JPS6366603U - - Google Patents

Info

Publication number
JPS6366603U
JPS6366603U JP16146286U JP16146286U JPS6366603U JP S6366603 U JPS6366603 U JP S6366603U JP 16146286 U JP16146286 U JP 16146286U JP 16146286 U JP16146286 U JP 16146286U JP S6366603 U JPS6366603 U JP S6366603U
Authority
JP
Japan
Prior art keywords
diaphragm
temperature
deformable member
sensitive deformable
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16146286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16146286U priority Critical patent/JPS6366603U/ja
Publication of JPS6366603U publication Critical patent/JPS6366603U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP16146286U 1986-10-21 1986-10-21 Pending JPS6366603U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16146286U JPS6366603U (enrdf_load_stackoverflow) 1986-10-21 1986-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16146286U JPS6366603U (enrdf_load_stackoverflow) 1986-10-21 1986-10-21

Publications (1)

Publication Number Publication Date
JPS6366603U true JPS6366603U (enrdf_load_stackoverflow) 1988-05-06

Family

ID=31087797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16146286U Pending JPS6366603U (enrdf_load_stackoverflow) 1986-10-21 1986-10-21

Country Status (1)

Country Link
JP (1) JPS6366603U (enrdf_load_stackoverflow)

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