JPS636657U - - Google Patents
Info
- Publication number
- JPS636657U JPS636657U JP10070786U JP10070786U JPS636657U JP S636657 U JPS636657 U JP S636657U JP 10070786 U JP10070786 U JP 10070786U JP 10070786 U JP10070786 U JP 10070786U JP S636657 U JPS636657 U JP S636657U
- Authority
- JP
- Japan
- Prior art keywords
- beam device
- ion beam
- insulating member
- emitter
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10070786U JPS636657U (fr) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10070786U JPS636657U (fr) | 1986-06-30 | 1986-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS636657U true JPS636657U (fr) | 1988-01-18 |
Family
ID=30970782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10070786U Pending JPS636657U (fr) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636657U (fr) |
-
1986
- 1986-06-30 JP JP10070786U patent/JPS636657U/ja active Pending