JPS6366485U - - Google Patents

Info

Publication number
JPS6366485U
JPS6366485U JP14276287U JP14276287U JPS6366485U JP S6366485 U JPS6366485 U JP S6366485U JP 14276287 U JP14276287 U JP 14276287U JP 14276287 U JP14276287 U JP 14276287U JP S6366485 U JPS6366485 U JP S6366485U
Authority
JP
Japan
Prior art keywords
fumigation
agent
heating
fumigating
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14276287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125572Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987142762U priority Critical patent/JPH0125572Y2/ja
Publication of JPS6366485U publication Critical patent/JPS6366485U/ja
Application granted granted Critical
Publication of JPH0125572Y2 publication Critical patent/JPH0125572Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Catching Or Destruction (AREA)
JP1987142762U 1987-09-17 1987-09-17 Expired JPH0125572Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987142762U JPH0125572Y2 (cs) 1987-09-17 1987-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987142762U JPH0125572Y2 (cs) 1987-09-17 1987-09-17

Publications (2)

Publication Number Publication Date
JPS6366485U true JPS6366485U (cs) 1988-05-02
JPH0125572Y2 JPH0125572Y2 (cs) 1989-07-31

Family

ID=31051800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987142762U Expired JPH0125572Y2 (cs) 1987-09-17 1987-09-17

Country Status (1)

Country Link
JP (1) JPH0125572Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12070875B2 (en) 2019-05-17 2024-08-27 Wolfspeed, Inc. Silicon carbide wafers with relaxed positive bow and related methods

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152075U (cs) * 1978-04-12 1979-10-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152075U (cs) * 1978-04-12 1979-10-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12070875B2 (en) 2019-05-17 2024-08-27 Wolfspeed, Inc. Silicon carbide wafers with relaxed positive bow and related methods

Also Published As

Publication number Publication date
JPH0125572Y2 (cs) 1989-07-31

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