JPS6366116U - - Google Patents

Info

Publication number
JPS6366116U
JPS6366116U JP16196386U JP16196386U JPS6366116U JP S6366116 U JPS6366116 U JP S6366116U JP 16196386 U JP16196386 U JP 16196386U JP 16196386 U JP16196386 U JP 16196386U JP S6366116 U JPS6366116 U JP S6366116U
Authority
JP
Japan
Prior art keywords
chemical solution
housing
chemical
etching
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16196386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16196386U priority Critical patent/JPS6366116U/ja
Publication of JPS6366116U publication Critical patent/JPS6366116U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
  • Weting (AREA)
JP16196386U 1986-10-22 1986-10-22 Pending JPS6366116U (US08177716-20120515-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16196386U JPS6366116U (US08177716-20120515-C00003.png) 1986-10-22 1986-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16196386U JPS6366116U (US08177716-20120515-C00003.png) 1986-10-22 1986-10-22

Publications (1)

Publication Number Publication Date
JPS6366116U true JPS6366116U (US08177716-20120515-C00003.png) 1988-05-02

Family

ID=31088773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16196386U Pending JPS6366116U (US08177716-20120515-C00003.png) 1986-10-22 1986-10-22

Country Status (1)

Country Link
JP (1) JPS6366116U (US08177716-20120515-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04176125A (ja) * 1990-11-08 1992-06-23 Nec Corp ウエハー処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04176125A (ja) * 1990-11-08 1992-06-23 Nec Corp ウエハー処理装置

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