JPS6365943U - - Google Patents

Info

Publication number

JPS6365943U

JPS6365943U JP16000386U JP16000386U JPS6365943U JP S6365943 U JPS6365943 U JP S6365943U JP 16000386 U JP16000386 U JP 16000386U JP 16000386 U JP16000386 U JP 16000386U JP S6365943 U JPS6365943 U JP S6365943U

Authority

JP

Japan

Prior art keywords

ion source

gas supply

filter

gas

supply device

Prior art date

1986-10-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007789 gas Substances 0.000 claims 2
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
• 150000002431 hydrogen Chemical class 0.000 claims 1
• 239000001257 hydrogen Substances 0.000 claims 1
• 229910052739 hydrogen Inorganic materials 0.000 claims 1
• 239000012528 membrane Substances 0.000 claims 1
• 238000000926 separation method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2