JPS6365642U - - Google Patents

Info

Publication number
JPS6365642U
JPS6365642U JP15964386U JP15964386U JPS6365642U JP S6365642 U JPS6365642 U JP S6365642U JP 15964386 U JP15964386 U JP 15964386U JP 15964386 U JP15964386 U JP 15964386U JP S6365642 U JPS6365642 U JP S6365642U
Authority
JP
Japan
Prior art keywords
rotors
semiconductor wafer
blades
transfer device
tips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15964386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15964386U priority Critical patent/JPS6365642U/ja
Publication of JPS6365642U publication Critical patent/JPS6365642U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
JP15964386U 1986-10-17 1986-10-17 Pending JPS6365642U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15964386U JPS6365642U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15964386U JPS6365642U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365642U true JPS6365642U (enrdf_load_stackoverflow) 1988-04-30

Family

ID=31084268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15964386U Pending JPS6365642U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365642U (enrdf_load_stackoverflow)

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