JPS6365218U - - Google Patents
Info
- Publication number
- JPS6365218U JPS6365218U JP15995686U JP15995686U JPS6365218U JP S6365218 U JPS6365218 U JP S6365218U JP 15995686 U JP15995686 U JP 15995686U JP 15995686 U JP15995686 U JP 15995686U JP S6365218 U JPS6365218 U JP S6365218U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust duct
- semiconductor manufacturing
- gaseous substance
- gas
- envelope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15995686U JPS6365218U (OSRAM) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15995686U JPS6365218U (OSRAM) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365218U true JPS6365218U (OSRAM) | 1988-04-30 |
Family
ID=31084872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15995686U Pending JPS6365218U (OSRAM) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365218U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02122076A (ja) * | 1988-10-28 | 1990-05-09 | Teru Kyushu Kk | 成膜方法および成膜装置 |
| JPH04346669A (ja) * | 1991-05-21 | 1992-12-02 | Nec Yamagata Ltd | 常圧ｃｖｄ装置 |
-
1986
- 1986-10-17 JP JP15995686U patent/JPS6365218U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02122076A (ja) * | 1988-10-28 | 1990-05-09 | Teru Kyushu Kk | 成膜方法および成膜装置 |
| JPH04346669A (ja) * | 1991-05-21 | 1992-12-02 | Nec Yamagata Ltd | 常圧ｃｖｄ装置 |