JPS6364646A - Grooved optical disk substrate and its production - Google Patents
Grooved optical disk substrate and its productionInfo
- Publication number
- JPS6364646A JPS6364646A JP61209004A JP20900486A JPS6364646A JP S6364646 A JPS6364646 A JP S6364646A JP 61209004 A JP61209004 A JP 61209004A JP 20900486 A JP20900486 A JP 20900486A JP S6364646 A JPS6364646 A JP S6364646A
- Authority
- JP
- Japan
- Prior art keywords
- optical disk
- substrate
- disk substrate
- tantalum
- grooved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 41
- 230000003287 optical effect Effects 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 15
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000011521 glass Substances 0.000 claims abstract description 13
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims abstract description 12
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000010409 thin film Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 abstract description 6
- 239000010432 diamond Substances 0.000 abstract description 6
- 125000006850 spacer group Chemical group 0.000 abstract description 4
- 238000005520 cutting process Methods 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザ光により情報を高密度に記録再生する
溝付光ディスク基板およびその製造方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a grooved optical disk substrate for recording and reproducing information at high density using laser light, and a method for manufacturing the same.
従来、溝付光ディスク基板の製造方法として、射出成形
法や、２ Ｐ （Ｐｈｏｔｏ−Ｐｏｌｙｎ＋ｅｒ ）法
（テレビジョン学会逼：ビデオディスクとＤＡＤ入門。Conventionally, methods for manufacturing grooved optical disc substrates include injection molding and the 2P (Photo-Polyn+er) method (Television Society: Introduction to Video Discs and DAD).
コロナ社、Ｐ１６８〜Ｐ１７０）が知られている。Corona Co., P168-P170) are known.
プラスチックは吸湿性と有し、また熱膨張、熱収縮を生
じやすいため従来のプラスチック製溝付光ディスク基板
は、基板寸法の経時変化が生じやすく、従来のプラスチ
ック製溝付光ディスク基板を用いて製作した光ディスク
は使用環境の変化により、記録再生特性に変化が生じや
すいという欠点を有していた。Because plastic is hygroscopic and prone to thermal expansion and contraction, conventional plastic grooved optical disk substrates are prone to changes in substrate dimensions over time. Optical discs have had the disadvantage that their recording and reproducing characteristics tend to change due to changes in the environment in which they are used.
本発明の目的は耐湿性、耐熱性に優れ、基板寸法の経時
変化が生じにくい信頼性の高い溝付光ディスク基板およ
びその製造方法を提供することにある。An object of the present invention is to provide a highly reliable grooved optical disk substrate that has excellent moisture resistance and heat resistance, and is resistant to changes in substrate dimensions over time, and a method for manufacturing the same.
本発明の溝付光ディスク基板は、透明のガラス板上に設
けた同心円状あるいはスパイラル状の微！Ｉ溝が、五酸
化タンタル薄膜より成ることにより構成される。また本
発明の構付光ディスク基板の製造方法は、透明のガラス
板上にタンタル薄膜を付着する工程と、該タンタル薄膜
に同心円状あるいはスパイラル状の微Ｍ！Ａｓを形成す
る工程と、前記微細溝を熱酸化する工程とから構成され
る。The grooved optical disk substrate of the present invention consists of concentric or spiral microscopic disks provided on a transparent glass plate. The I-groove is constructed from a tantalum pentoxide thin film. Further, the method for manufacturing a structured optical disk substrate of the present invention includes a step of depositing a tantalum thin film on a transparent glass plate, and a concentric or spiral micro M! The method consists of a step of forming As and a step of thermally oxidizing the fine grooves.
−ｉにプラスチックは吸湿性含有している。これに対し
てガラスおよび五酸化タンタルは耐水性に潰れるという
性質を有している。また、−ａにプラスチックの熱ｙ５
張係数は１０−５／’Ｃのオーダであるのに対しガラス
および酸化物である五酸化タンタルは１０−６／℃のオ
ーダの熱膨張係数と有す。このためガラスおよび五酸化
タンタルにより構成した光ディスク基板は、従来のプラ
スチック基板に比べ耐湿性、耐熱性に優れる。-i contains hygroscopicity in plastic. On the other hand, glass and tantalum pentoxide have the property of being water resistant and collapsible. Also, -a is the heat of plastic y5
The tensile modulus is on the order of 10-5/'C, whereas glass and the oxide tantalum pentoxide have a coefficient of thermal expansion on the order of 10-6/'C. Therefore, optical disc substrates made of glass and tantalum pentoxide have better moisture resistance and heat resistance than conventional plastic substrates.
構付光ディスク基板において、微細溝が形成されている
面をグループ形成面、その反対側の面をフラット面と呼
ぶことにすると、一般に情報の記録再生はフラット面側
からレーザ光を入射することにより行われる。In a structured optical disk substrate, the surface on which fine grooves are formed is called the group forming surface, and the surface on the opposite side is called the flat surface.In general, information is recorded and reproduced by inputting a laser beam from the flat surface side. It will be done.
透明のガラス板上に形成したタンタル薄膜に同心円状あ
るいはスパイラル状に微細溝を形成した構付光ディスク
基板では、タンタル薄膜がレーザ光をほとんど透過しな
いため、フラット面側からレーザ光を入射し、記録再生
を行うことは困難である。ところが、タンタル薄膜を熱
酸化するとタンタルは五酸化タンタルになり、基板を透
明化することができ、従来のプラスチック製溝付光ディ
スク基板と同様にフラット面側からレーザ光を入射し、
記録再生を行うことができる。In structured optical disk substrates, in which fine grooves are formed concentrically or spirally in a tantalum thin film formed on a transparent glass plate, the tantalum thin film hardly transmits laser light, so the laser light enters from the flat side and records. Regeneration is difficult. However, when a tantalum thin film is thermally oxidized, the tantalum turns into tantalum pentoxide, making it possible to make the substrate transparent.As with conventional plastic grooved optical disk substrates, laser light can be incident on the flat surface side.
Recording and playback can be performed.
以下、本発明の一実施例について、図面を参照して詳細
に説明する。Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.
第１図は本発明の一実施例により得られた構付光ディス
ク基板の断面図を示す。第２図（ａ）〜（Ｃ）は第１図
に示す構付光ディスク基板の製造方法を工程順に示した
模式図である。まず第２図（ａ）に示すように直径１２
０ｍｍ、板厚１．２ｍｍの透明なガラス板１Ｘ上に０．
１μｍの厚さにタンタル薄膜１４をＲＦスパッタにより
形成した。FIG. 1 shows a sectional view of a structured optical disk substrate obtained according to an embodiment of the present invention. FIGS. 2(a) to 2(C) are schematic diagrams showing the method of manufacturing the structured optical disk substrate shown in FIG. 1 in order of steps. First, as shown in Figure 2 (a), the diameter is 12 mm.
0 mm on a transparent glass plate 1X with a plate thickness of 1.2 mm.
A tantalum thin film 14 having a thickness of 1 μm was formed by RF sputtering.
次に第３図に示すダイヤモンドバイト１５を用いて第２
図（ｂ）に示すように切削法によりタンタル３膜１４上
に微細溝１３をスパイラル状に形成した。Next, use the diamond cutting tool 15 shown in FIG.
As shown in Figure (b), micro grooves 13 were formed in a spiral shape on the tantalum 3 film 14 by a cutting method.
以上のように形成した溝付基板を第２図（ｃ）に示すよ
うに５００℃の高温酸化雰囲気に保った電気炉１６内で
３０分間熱処理をしたところ、タンタル薄膜１４は酸化
され第１図に示すように、五酸化タンタル薄膜１２とな
り、透明な溝付光ディスク基板が得られた。なお、タン
タル薄膜１４を′酸化し、五酸化タンタル薄膜１２とす
る際に体積変化が生じ、微細溝１３の形状の寸法が変化
する。When the grooved substrate formed as described above was heat-treated for 30 minutes in an electric furnace 16 maintained in a high-temperature oxidizing atmosphere at 500° C. as shown in FIG. 2(c), the tantalum thin film 14 was oxidized, as shown in FIG. As shown in FIG. 2, a tantalum pentoxide thin film 12 was formed, and a transparent grooved optical disk substrate was obtained. Note that when the tantalum thin film 14 is oxidized to form the tantalum pentoxide thin film 12, a volume change occurs, and the dimensions of the shape of the fine grooves 13 change.
本発明の一実施例においては五酸化タンタル薄膜１２上
の微細溝１３が溝幅０．８μｍ、溝深さ０．０７μｍ、
ピッチ１．６μｍとなるように、タンタル薄膜１４上に
微細溝１３を形成した。In one embodiment of the present invention, the fine grooves 13 on the tantalum pentoxide thin film 12 have a groove width of 0.8 μm, a groove depth of 0.07 μm,
Fine grooves 13 were formed on the tantalum thin film 14 at a pitch of 1.6 μm.
以上のようにして製造した溝付光ディスク基板に第４図
に示すように、記録媒体１７を成膜後、内周スペーサ１
８および外周スペーサ１９を用いて貼り合わせた、−１
Ｈにエアーサンドイッチ構造と呼ばれる光ディスクを製
作し、温度６０℃、湿度８０％の高温光温度雰囲気中に
１０００時間放置し、寿命試験を行った。一方、第５図
に示すように、従来のインジェクション法により成形し
たポリカーボネート基板２０を用い同図に示すような構
成の光ディスクを製作し、同様に寿命試験を行った。After forming the recording medium 17 on the grooved optical disk substrate manufactured as described above, as shown in FIG.
8 and outer circumferential spacer 19, -1
An optical disk with a so-called air sandwich structure was manufactured, and a life test was conducted by leaving it in a high-temperature light atmosphere of 60° C. and 80% humidity for 1000 hours. On the other hand, as shown in FIG. 5, an optical disk having the configuration shown in FIG. 5 was manufactured using a polycarbonate substrate 20 molded by the conventional injection method, and a life test was similarly conducted.
その結果、ポリカーボネート基板２０を用いて製作した
光ディスクは寿命試験後には中心部がふくらみ、第５図
に示す基板のそり角θを測定したところ寿命試験の前後
で０．１°から０．４°に増加した。一方、本発明の一
実施例で製作した第４図に示す光ディスクは、寿命試験
の前後で寸法形状の変化はなく、そり角θはθ≠０°と
一定であった。As a result, the center of the optical disk manufactured using the polycarbonate substrate 20 bulged after the life test, and when the warp angle θ of the substrate was measured as shown in FIG. 5, it was 0.1° to 0.4° before and after the life test. increased to On the other hand, the optical disk shown in FIG. 4 manufactured according to an embodiment of the present invention had no change in size and shape before and after the life test, and the warp angle θ was constant, θ≠0°.
以上のように本発明による構付光ディスク基板は耐湿性
および耐熱性に優れることご確認した。As described above, it has been confirmed that the structured optical disk substrate according to the present invention has excellent moisture resistance and heat resistance.
なお、本発明の一実施例では微ａｌ溝の形成をダイヤモ
ンドカッティング法により行ったが、微細溝の形成をイ
オンエツチングにより行っても同様の効果が得られるこ
とを’ｉ？ｉ 比した。In one embodiment of the present invention, the fine Al grooves were formed by the diamond cutting method, but it is possible to obtain the same effect even if the fine grooves are formed by ion etching. i compared.
以上詳述したように本発明によれば、耐湿性および耐熱
性に優れ、基板寸法に経時変化が生じにくい、信顆性の
高い溝付光ディスク基板を得られるという効果がある。As detailed above, according to the present invention, it is possible to obtain a grooved optical disk substrate which is excellent in moisture resistance and heat resistance, has a substrate dimension that does not easily change over time, and has high reliability.
また本発明による溝付光ディスク基板の製造方法では、
ガラス板上に設けた同心円状あるいはスパイラル状の微
細溝が、五酸化タンタルｆｌａより成るので、フラット
面からレーザ光を入射して記録再生を行うことができる
という効果がある。Further, in the method for manufacturing a grooved optical disk substrate according to the present invention,
Since the concentric or spiral microgrooves provided on the glass plate are made of tantalum pentoxide fla, there is an effect that recording and reproduction can be performed by entering a laser beam from a flat surface.
第１図は本発明の溝付光ディスク基板の一実施例の断面
図、第２図（ａ）〜（ｃ）は、本発明の溝付光ディスク
基板の製造方法の一実施例をその工程順に示す模式図、
第３図は第２図の実施例に用いたダイヤモンドバイトの
正面図、第４図は第１図の溝付光ディスク基板を用いて
製作した光ディスクの断面図、第５図は従来のプラスチ
ック基板を用いた光ディスクの断面図である。
１１・・ガラス板、１２・五酸１ヒタンタル；）１摸、
１３・・・微細溝、１４・タンタル薄ｊ摸、１５・・・
ターイヤモンドバイト、１６・・電気炉、１７・・記録
媒体、１８・・・内周スペーサ、１９・・・外周スペー
サ、２０・・・ポリカーボネー１〜基板。
＝と
代理人 弁理士 内 原 ｈ ノ
、、、７３．４：／、″””
翁１図
筋２図
第３０
／ど
万４図
箔、勺図FIG. 1 is a sectional view of an embodiment of a grooved optical disk substrate of the present invention, and FIGS. 2(a) to 2(c) show an embodiment of the method for manufacturing a grooved optical disk substrate of the present invention in the order of steps. Pattern diagram,
Fig. 3 is a front view of the diamond cutting tool used in the embodiment shown in Fig. 2, Fig. 4 is a sectional view of an optical disc manufactured using the grooved optical disc substrate of Fig. 1, and Fig. 5 is a front view of the diamond cutting tool used in the embodiment of Fig. 2. FIG. 3 is a cross-sectional view of the optical disc used. 11.Glass plate, 12.Pentacid 1 hytantal;) 1 copy,
13... Fine groove, 14. Tantalum thin j model, 15...
Diamond cutting tool, 16... Electric furnace, 17... Recording medium, 18... Inner spacer, 19... Outer spacer, 20... Polycarbonate 1 to substrate. = and agent Patent attorney Uchihara hノ,,,73.4:/,'''' Okina 1 diagram 2 Figure 30 / Doman 4 diagram Haku, Uzu diagram
Claims (2)
イラル状の微細溝が、五酸化タンタル薄膜より成ること
を特徴とする溝付光ディスク基板。(1) A grooved optical disk substrate characterized in that concentric or spiral microscopic grooves provided on a transparent glass plate are made of tantalum pentoxide thin film.
と、該タンタル薄膜に同心円状あるいはスパイラル状の
微細溝を形成する工程と、前記微細溝を熱酸化する工程
とから成ることを特徴とする溝付光ディスク基板の製造
方法。(2) It is characterized by comprising the steps of depositing a tantalum thin film on a transparent glass plate, forming concentric or spiral microgrooves in the tantalum thin film, and thermally oxidizing the microgrooves. A method for manufacturing a grooved optical disk substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61209004A JPS6364646A (en) | 1986-09-04 | 1986-09-04 | Grooved optical disk substrate and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61209004A JPS6364646A (en) | 1986-09-04 | 1986-09-04 | Grooved optical disk substrate and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364646A true JPS6364646A (en) | 1988-03-23 |
Family
ID=16565704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61209004A Pending JPS6364646A (en) | 1986-09-04 | 1986-09-04 | Grooved optical disk substrate and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364646A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02177030A (en) * | 1988-12-27 | 1990-07-10 | Sharp Corp | Optical memory element |
| JPH02296009A (en) * | 1989-05-11 | 1990-12-06 | Canon Inc | Dynamic pressure bearing device |
| JP2007284084A (en) * | 2006-04-14 | 2007-11-01 | Lion Corp | Container with cap |
-
1986
- 1986-09-04 JP JP61209004A patent/JPS6364646A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02177030A (en) * | 1988-12-27 | 1990-07-10 | Sharp Corp | Optical memory element |
| JPH02296009A (en) * | 1989-05-11 | 1990-12-06 | Canon Inc | Dynamic pressure bearing device |
| JP2007284084A (en) * | 2006-04-14 | 2007-11-01 | Lion Corp | Container with cap |
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