JPS6364031U - - Google Patents
Info
- Publication number
- JPS6364031U JPS6364031U JP15910786U JP15910786U JPS6364031U JP S6364031 U JPS6364031 U JP S6364031U JP 15910786 U JP15910786 U JP 15910786U JP 15910786 U JP15910786 U JP 15910786U JP S6364031 U JPS6364031 U JP S6364031U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processing liquid
- tank
- processing tank
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 239000003595 mist Substances 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims description 2
Landscapes
- Special Spraying Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15910786U JPS6364031U (fi) | 1986-10-16 | 1986-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15910786U JPS6364031U (fi) | 1986-10-16 | 1986-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364031U true JPS6364031U (fi) | 1988-04-27 |
Family
ID=31083228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15910786U Pending JPS6364031U (fi) | 1986-10-16 | 1986-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364031U (fi) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59175122A (ja) * | 1983-03-23 | 1984-10-03 | Nec Corp | 半導体基板塗布前処理装置 |
| JPS6038081A (ja) * | 1983-08-10 | 1985-02-27 | Mitsubishi Heavy Ind Ltd | フラツシユ蒸発型造水装置 |
| JPS6123324A (ja) * | 1984-07-11 | 1986-01-31 | Hitachi Ltd | 乾燥装置 |
-
1986
- 1986-10-16 JP JP15910786U patent/JPS6364031U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59175122A (ja) * | 1983-03-23 | 1984-10-03 | Nec Corp | 半導体基板塗布前処理装置 |
| JPS6038081A (ja) * | 1983-08-10 | 1985-02-27 | Mitsubishi Heavy Ind Ltd | フラツシユ蒸発型造水装置 |
| JPS6123324A (ja) * | 1984-07-11 | 1986-01-31 | Hitachi Ltd | 乾燥装置 |