JPS6363780U - - Google Patents
Info
- Publication number
- JPS6363780U JPS6363780U JP15848586U JP15848586U JPS6363780U JP S6363780 U JPS6363780 U JP S6363780U JP 15848586 U JP15848586 U JP 15848586U JP 15848586 U JP15848586 U JP 15848586U JP S6363780 U JPS6363780 U JP S6363780U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- probe
- measuring device
- contact
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15848586U JPS6363780U (zh) | 1986-10-15 | 1986-10-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15848586U JPS6363780U (zh) | 1986-10-15 | 1986-10-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6363780U true JPS6363780U (zh) | 1988-04-27 |
Family
ID=31082021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15848586U Pending JPS6363780U (zh) | 1986-10-15 | 1986-10-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6363780U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06124985A (ja) * | 1992-10-13 | 1994-05-06 | Tokyo Electron Yamanashi Kk | プローブ装置及びプロービング方法 |
JPH08195423A (ja) * | 1995-01-13 | 1996-07-30 | Nec Corp | 半導体測定方法 |
-
1986
- 1986-10-15 JP JP15848586U patent/JPS6363780U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06124985A (ja) * | 1992-10-13 | 1994-05-06 | Tokyo Electron Yamanashi Kk | プローブ装置及びプロービング方法 |
JPH08195423A (ja) * | 1995-01-13 | 1996-07-30 | Nec Corp | 半導体測定方法 |