JPS6363737U - - Google Patents

Info

Publication number
JPS6363737U
JPS6363737U JP15792786U JP15792786U JPS6363737U JP S6363737 U JPS6363737 U JP S6363737U JP 15792786 U JP15792786 U JP 15792786U JP 15792786 U JP15792786 U JP 15792786U JP S6363737 U JPS6363737 U JP S6363737U
Authority
JP
Japan
Prior art keywords
sensor chip
semiconductor substrate
semiconductor
diaphragm
melting point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15792786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15792786U priority Critical patent/JPS6363737U/ja
Publication of JPS6363737U publication Critical patent/JPS6363737U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP15792786U 1986-10-15 1986-10-15 Pending JPS6363737U (US20030157376A1-20030821-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15792786U JPS6363737U (US20030157376A1-20030821-M00001.png) 1986-10-15 1986-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15792786U JPS6363737U (US20030157376A1-20030821-M00001.png) 1986-10-15 1986-10-15

Publications (1)

Publication Number Publication Date
JPS6363737U true JPS6363737U (US20030157376A1-20030821-M00001.png) 1988-04-27

Family

ID=31080931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15792786U Pending JPS6363737U (US20030157376A1-20030821-M00001.png) 1986-10-15 1986-10-15

Country Status (1)

Country Link
JP (1) JPS6363737U (US20030157376A1-20030821-M00001.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535981A (en) * 1976-07-06 1978-01-19 Toyoda Chuo Kenkyusho Kk Method of producing semiconductor device
JPS53125880A (en) * 1977-04-08 1978-11-02 Toyoda Chuo Kenkyusho Kk Pressure converter
JPS61230382A (ja) * 1985-04-05 1986-10-14 Yokogawa Electric Corp 半導体圧力センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535981A (en) * 1976-07-06 1978-01-19 Toyoda Chuo Kenkyusho Kk Method of producing semiconductor device
JPS53125880A (en) * 1977-04-08 1978-11-02 Toyoda Chuo Kenkyusho Kk Pressure converter
JPS61230382A (ja) * 1985-04-05 1986-10-14 Yokogawa Electric Corp 半導体圧力センサ

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