JPS6363719U - - Google Patents
Info
- Publication number
- JPS6363719U JPS6363719U JP15964586U JP15964586U JPS6363719U JP S6363719 U JPS6363719 U JP S6363719U JP 15964586 U JP15964586 U JP 15964586U JP 15964586 U JP15964586 U JP 15964586U JP S6363719 U JPS6363719 U JP S6363719U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- exhaust
- introduction box
- gas introduction
- exhaust gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964586U JPS6363719U (ru) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964586U JPS6363719U (ru) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6363719U true JPS6363719U (ru) | 1988-04-27 |
Family
ID=31084272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15964586U Pending JPS6363719U (ru) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6363719U (ru) |
-
1986
- 1986-10-17 JP JP15964586U patent/JPS6363719U/ja active Pending
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