JPS6361124U - - Google Patents

Info

Publication number
JPS6361124U
JPS6361124U JP15596886U JP15596886U JPS6361124U JP S6361124 U JPS6361124 U JP S6361124U JP 15596886 U JP15596886 U JP 15596886U JP 15596886 U JP15596886 U JP 15596886U JP S6361124 U JPS6361124 U JP S6361124U
Authority
JP
Japan
Prior art keywords
etching
detecting
end point
mask pattern
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15596886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436109Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15596886U priority Critical patent/JPH0436109Y2/ja
Publication of JPS6361124U publication Critical patent/JPS6361124U/ja
Application granted granted Critical
Publication of JPH0436109Y2 publication Critical patent/JPH0436109Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP15596886U 1986-10-09 1986-10-09 Expired JPH0436109Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15596886U JPH0436109Y2 (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15596886U JPH0436109Y2 (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Publications (2)

Publication Number Publication Date
JPS6361124U true JPS6361124U (enrdf_load_stackoverflow) 1988-04-22
JPH0436109Y2 JPH0436109Y2 (enrdf_load_stackoverflow) 1992-08-26

Family

ID=31077146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15596886U Expired JPH0436109Y2 (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Country Status (1)

Country Link
JP (1) JPH0436109Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0436109Y2 (enrdf_load_stackoverflow) 1992-08-26

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