JPS6361124U - - Google Patents
Info
- Publication number
- JPS6361124U JPS6361124U JP15596886U JP15596886U JPS6361124U JP S6361124 U JPS6361124 U JP S6361124U JP 15596886 U JP15596886 U JP 15596886U JP 15596886 U JP15596886 U JP 15596886U JP S6361124 U JPS6361124 U JP S6361124U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- detecting
- end point
- mask pattern
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15596886U JPH0436109Y2 (OSRAM) | 1986-10-09 | 1986-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15596886U JPH0436109Y2 (OSRAM) | 1986-10-09 | 1986-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6361124U true JPS6361124U (OSRAM) | 1988-04-22 |
| JPH0436109Y2 JPH0436109Y2 (OSRAM) | 1992-08-26 |
Family
ID=31077146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15596886U Expired JPH0436109Y2 (OSRAM) | 1986-10-09 | 1986-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436109Y2 (OSRAM) |
-
1986
- 1986-10-09 JP JP15596886U patent/JPH0436109Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436109Y2 (OSRAM) | 1992-08-26 |