JPS6360475U - - Google Patents
Info
- Publication number
- JPS6360475U JPS6360475U JP15344686U JP15344686U JPS6360475U JP S6360475 U JPS6360475 U JP S6360475U JP 15344686 U JP15344686 U JP 15344686U JP 15344686 U JP15344686 U JP 15344686U JP S6360475 U JPS6360475 U JP S6360475U
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- supporting
- wafer
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15344686U JPS6360475U (fr) | 1986-10-06 | 1986-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15344686U JPS6360475U (fr) | 1986-10-06 | 1986-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360475U true JPS6360475U (fr) | 1988-04-22 |
Family
ID=31072335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15344686U Pending JPS6360475U (fr) | 1986-10-06 | 1986-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360475U (fr) |
-
1986
- 1986-10-06 JP JP15344686U patent/JPS6360475U/ja active Pending