JPS6360473U - - Google Patents

Info

Publication number

JPS6360473U

JPS6360473U JP15179386U JP15179386U JPS6360473U JP S6360473 U JPS6360473 U JP S6360473U JP 15179386 U JP15179386 U JP 15179386U JP 15179386 U JP15179386 U JP 15179386U JP S6360473 U JPS6360473 U JP S6360473U

Authority

JP

Japan

Prior art keywords

sample

vacuum

processing chamber

evacuated

etching

Prior art date

1986-10-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005530 etching Methods 0.000 claims description 5
• 238000010884 ion-beam technique Methods 0.000 claims description 2
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000002360 preparation method Methods 0.000 description 1