JPS6360470U - - Google Patents
Info
- Publication number
- JPS6360470U JPS6360470U JP15278086U JP15278086U JPS6360470U JP S6360470 U JPS6360470 U JP S6360470U JP 15278086 U JP15278086 U JP 15278086U JP 15278086 U JP15278086 U JP 15278086U JP S6360470 U JPS6360470 U JP S6360470U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- electrode
- electrode holder
- pair
- biasing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007769 metal material Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15278086U JPS6360470U (enExample) | 1986-10-02 | 1986-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15278086U JPS6360470U (enExample) | 1986-10-02 | 1986-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360470U true JPS6360470U (enExample) | 1988-04-22 |
Family
ID=31071068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15278086U Pending JPS6360470U (enExample) | 1986-10-02 | 1986-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360470U (enExample) |
-
1986
- 1986-10-02 JP JP15278086U patent/JPS6360470U/ja active Pending