JPS6360264U - - Google Patents

Info

Publication number
JPS6360264U
JPS6360264U JP15399186U JP15399186U JPS6360264U JP S6360264 U JPS6360264 U JP S6360264U JP 15399186 U JP15399186 U JP 15399186U JP 15399186 U JP15399186 U JP 15399186U JP S6360264 U JPS6360264 U JP S6360264U
Authority
JP
Japan
Prior art keywords
inner tube
tube
generating inner
ended
appropriately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15399186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15399186U priority Critical patent/JPS6360264U/ja
Publication of JPS6360264U publication Critical patent/JPS6360264U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vessels And Coating Films For Discharge Lamps (AREA)
JP15399186U 1986-10-07 1986-10-07 Pending JPS6360264U (US06168655-20010102-C00055.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15399186U JPS6360264U (US06168655-20010102-C00055.png) 1986-10-07 1986-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15399186U JPS6360264U (US06168655-20010102-C00055.png) 1986-10-07 1986-10-07

Publications (1)

Publication Number Publication Date
JPS6360264U true JPS6360264U (US06168655-20010102-C00055.png) 1988-04-21

Family

ID=31073380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15399186U Pending JPS6360264U (US06168655-20010102-C00055.png) 1986-10-07 1986-10-07

Country Status (1)

Country Link
JP (1) JPS6360264U (US06168655-20010102-C00055.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546259A (en) * 1978-09-27 1980-03-31 Toshiba Corp Metal vapor discharge lamp
JPS5723861B2 (US06168655-20010102-C00055.png) * 1977-10-26 1982-05-20
JPS5854544A (ja) * 1981-09-29 1983-03-31 Toshiba Corp 紫外線放射用二重管形ランプ
JPS60105159A (ja) * 1983-11-11 1985-06-10 Hitachi Ltd 露光装置用光源

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723861B2 (US06168655-20010102-C00055.png) * 1977-10-26 1982-05-20
JPS5546259A (en) * 1978-09-27 1980-03-31 Toshiba Corp Metal vapor discharge lamp
JPS5854544A (ja) * 1981-09-29 1983-03-31 Toshiba Corp 紫外線放射用二重管形ランプ
JPS60105159A (ja) * 1983-11-11 1985-06-10 Hitachi Ltd 露光装置用光源

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