JPS6359322U - - Google Patents

Info

Publication number

JPS6359322U

JPS6359322U JP15335886U JP15335886U JPS6359322U JP S6359322 U JPS6359322 U JP S6359322U JP 15335886 U JP15335886 U JP 15335886U JP 15335886 U JP15335886 U JP 15335886U JP S6359322 U JPS6359322 U JP S6359322U

Authority

JP

Japan

Prior art keywords

wafer

coating

suction plate

wafer suction

rotation

Prior art date

1986-10-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011248 coating agent Substances 0.000 claims description 5
• 238000000576 coating method Methods 0.000 claims description 5
• 239000000463 material Substances 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000004528 spin coating Methods 0.000 description 2
• 238000001179 sorption measurement Methods 0.000 description 1

Cited By (1)