JPS6357763U - - Google Patents
Info
- Publication number
- JPS6357763U JPS6357763U JP15166486U JP15166486U JPS6357763U JP S6357763 U JPS6357763 U JP S6357763U JP 15166486 U JP15166486 U JP 15166486U JP 15166486 U JP15166486 U JP 15166486U JP S6357763 U JPS6357763 U JP S6357763U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- preliminary
- electrode
- discharge current
- gas laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15166486U JPS6357763U (de) | 1986-10-01 | 1986-10-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15166486U JPS6357763U (de) | 1986-10-01 | 1986-10-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6357763U true JPS6357763U (de) | 1988-04-18 |
Family
ID=31068938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15166486U Pending JPS6357763U (de) | 1986-10-01 | 1986-10-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6357763U (de) |
-
1986
- 1986-10-01 JP JP15166486U patent/JPS6357763U/ja active Pending