JPS6357763U - - Google Patents

Info

Publication number
JPS6357763U
JPS6357763U JP15166486U JP15166486U JPS6357763U JP S6357763 U JPS6357763 U JP S6357763U JP 15166486 U JP15166486 U JP 15166486U JP 15166486 U JP15166486 U JP 15166486U JP S6357763 U JPS6357763 U JP S6357763U
Authority
JP
Japan
Prior art keywords
substrate
preliminary
electrode
discharge current
gas laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15166486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15166486U priority Critical patent/JPS6357763U/ja
Publication of JPS6357763U publication Critical patent/JPS6357763U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP15166486U 1986-10-01 1986-10-01 Pending JPS6357763U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15166486U JPS6357763U (de) 1986-10-01 1986-10-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15166486U JPS6357763U (de) 1986-10-01 1986-10-01

Publications (1)

Publication Number Publication Date
JPS6357763U true JPS6357763U (de) 1988-04-18

Family

ID=31068938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15166486U Pending JPS6357763U (de) 1986-10-01 1986-10-01

Country Status (1)

Country Link
JP (1) JPS6357763U (de)

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