JPS6357353U - - Google Patents

Info

Publication number
JPS6357353U
JPS6357353U JP15040386U JP15040386U JPS6357353U JP S6357353 U JPS6357353 U JP S6357353U JP 15040386 U JP15040386 U JP 15040386U JP 15040386 U JP15040386 U JP 15040386U JP S6357353 U JPS6357353 U JP S6357353U
Authority
JP
Japan
Prior art keywords
diaphragm
purge
discharge pipe
chamber
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15040386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318689Y2 (US20020095090A1-20020718-M00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15040386U priority Critical patent/JPH0318689Y2/ja
Publication of JPS6357353U publication Critical patent/JPS6357353U/ja
Application granted granted Critical
Publication of JPH0318689Y2 publication Critical patent/JPH0318689Y2/ja
Expired legal-status Critical Current

Links

JP15040386U 1986-09-30 1986-09-30 Expired JPH0318689Y2 (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15040386U JPH0318689Y2 (US20020095090A1-20020718-M00002.png) 1986-09-30 1986-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15040386U JPH0318689Y2 (US20020095090A1-20020718-M00002.png) 1986-09-30 1986-09-30

Publications (2)

Publication Number Publication Date
JPS6357353U true JPS6357353U (US20020095090A1-20020718-M00002.png) 1988-04-16
JPH0318689Y2 JPH0318689Y2 (US20020095090A1-20020718-M00002.png) 1991-04-19

Family

ID=31066516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15040386U Expired JPH0318689Y2 (US20020095090A1-20020718-M00002.png) 1986-09-30 1986-09-30

Country Status (1)

Country Link
JP (1) JPH0318689Y2 (US20020095090A1-20020718-M00002.png)

Also Published As

Publication number Publication date
JPH0318689Y2 (US20020095090A1-20020718-M00002.png) 1991-04-19

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