JPS635633U - - Google Patents
Info
- Publication number
- JPS635633U JPS635633U JP9771886U JP9771886U JPS635633U JP S635633 U JPS635633 U JP S635633U JP 9771886 U JP9771886 U JP 9771886U JP 9771886 U JP9771886 U JP 9771886U JP S635633 U JPS635633 U JP S635633U
- Authority
- JP
- Japan
- Prior art keywords
- switching
- signal
- etching
- light intensity
- plasma light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims 4
- 230000007423 decrease Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9771886U JPH0510355Y2 (https=) | 1986-06-27 | 1986-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9771886U JPH0510355Y2 (https=) | 1986-06-27 | 1986-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS635633U true JPS635633U (https=) | 1988-01-14 |
| JPH0510355Y2 JPH0510355Y2 (https=) | 1993-03-15 |
Family
ID=30964962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9771886U Expired - Lifetime JPH0510355Y2 (https=) | 1986-06-27 | 1986-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0510355Y2 (https=) |
-
1986
- 1986-06-27 JP JP9771886U patent/JPH0510355Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0510355Y2 (https=) | 1993-03-15 |