JPS6356256U - - Google Patents
Info
- Publication number
- JPS6356256U JPS6356256U JP14610386U JP14610386U JPS6356256U JP S6356256 U JPS6356256 U JP S6356256U JP 14610386 U JP14610386 U JP 14610386U JP 14610386 U JP14610386 U JP 14610386U JP S6356256 U JPS6356256 U JP S6356256U
- Authority
- JP
- Japan
- Prior art keywords
- heat transfer
- plate
- elastic heat
- cooling metal
- metal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000005477 sputtering target Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14610386U JPS6356256U (de) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14610386U JPS6356256U (de) | 1986-09-24 | 1986-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6356256U true JPS6356256U (de) | 1988-04-15 |
Family
ID=31058260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14610386U Pending JPS6356256U (de) | 1986-09-24 | 1986-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6356256U (de) |
-
1986
- 1986-09-24 JP JP14610386U patent/JPS6356256U/ja active Pending