JPS6355542U - - Google Patents

Info

Publication number

JPS6355542U

JPS6355542U JP14941386U JP14941386U JPS6355542U JP S6355542 U JPS6355542 U JP S6355542U JP 14941386 U JP14941386 U JP 14941386U JP 14941386 U JP14941386 U JP 14941386U JP S6355542 U JPS6355542 U JP S6355542U

Authority

JP

Japan

Prior art keywords

layer

oxide film

semiconductor device

insulating film

film

Prior art date

1986-09-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010410 layer Substances 0.000 claims description 7
• 239000011229 interlayer Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000007740 vapor deposition Methods 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
• 229910052782 aluminium Inorganic materials 0.000 description 2
• 150000004767 nitrides Chemical class 0.000 description 2
• 239000012808 vapor phase Substances 0.000 description 2
• 239000000758 substrate Substances 0.000 description 1
• 238000001947 vapour-phase growth Methods 0.000 description 1