JPS6355540U - - Google Patents
Info
- Publication number
- JPS6355540U JPS6355540U JP14928686U JP14928686U JPS6355540U JP S6355540 U JPS6355540 U JP S6355540U JP 14928686 U JP14928686 U JP 14928686U JP 14928686 U JP14928686 U JP 14928686U JP S6355540 U JPS6355540 U JP S6355540U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- driven part
- wafer
- insulating material
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928686U JPS6355540U (hu) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928686U JPS6355540U (hu) | 1986-09-29 | 1986-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355540U true JPS6355540U (hu) | 1988-04-14 |
Family
ID=31064350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14928686U Pending JPS6355540U (hu) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355540U (hu) |
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1986
- 1986-09-29 JP JP14928686U patent/JPS6355540U/ja active Pending