JPS6355533U - - Google Patents

Info

Publication number
JPS6355533U
JPS6355533U JP14941286U JP14941286U JPS6355533U JP S6355533 U JPS6355533 U JP S6355533U JP 14941286 U JP14941286 U JP 14941286U JP 14941286 U JP14941286 U JP 14941286U JP S6355533 U JPS6355533 U JP S6355533U
Authority
JP
Japan
Prior art keywords
pattern
layers
dimensional accuracy
layer side
alignment correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14941286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14941286U priority Critical patent/JPS6355533U/ja
Publication of JPS6355533U publication Critical patent/JPS6355533U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14941286U 1986-09-29 1986-09-29 Pending JPS6355533U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14941286U JPS6355533U (enrdf_load_stackoverflow) 1986-09-29 1986-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14941286U JPS6355533U (enrdf_load_stackoverflow) 1986-09-29 1986-09-29

Publications (1)

Publication Number Publication Date
JPS6355533U true JPS6355533U (enrdf_load_stackoverflow) 1988-04-14

Family

ID=31064595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14941286U Pending JPS6355533U (enrdf_load_stackoverflow) 1986-09-29 1986-09-29

Country Status (1)

Country Link
JP (1) JPS6355533U (enrdf_load_stackoverflow)

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