JPS6355437U - - Google Patents
Info
- Publication number
- JPS6355437U JPS6355437U JP14823386U JP14823386U JPS6355437U JP S6355437 U JPS6355437 U JP S6355437U JP 14823386 U JP14823386 U JP 14823386U JP 14823386 U JP14823386 U JP 14823386U JP S6355437 U JPS6355437 U JP S6355437U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- growth apparatus
- phase growth
- growth
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14823386U JPS6355437U (zh) | 1986-09-26 | 1986-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14823386U JPS6355437U (zh) | 1986-09-26 | 1986-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355437U true JPS6355437U (zh) | 1988-04-13 |
Family
ID=31062312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14823386U Pending JPS6355437U (zh) | 1986-09-26 | 1986-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355437U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101248476B1 (ko) * | 2012-03-15 | 2013-04-02 | 주식회사루미지엔테크 | 박막 형성 장치 |
-
1986
- 1986-09-26 JP JP14823386U patent/JPS6355437U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101248476B1 (ko) * | 2012-03-15 | 2013-04-02 | 주식회사루미지엔테크 | 박막 형성 장치 |