JPS6354245U - - Google Patents

Info

Publication number
JPS6354245U
JPS6354245U JP14834786U JP14834786U JPS6354245U JP S6354245 U JPS6354245 U JP S6354245U JP 14834786 U JP14834786 U JP 14834786U JP 14834786 U JP14834786 U JP 14834786U JP S6354245 U JPS6354245 U JP S6354245U
Authority
JP
Japan
Prior art keywords
ion pump
vacuum
degree
function
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14834786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14834786U priority Critical patent/JPS6354245U/ja
Publication of JPS6354245U publication Critical patent/JPS6354245U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP14834786U 1986-09-26 1986-09-26 Pending JPS6354245U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14834786U JPS6354245U (US08063081-20111122-C00115.png) 1986-09-26 1986-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14834786U JPS6354245U (US08063081-20111122-C00115.png) 1986-09-26 1986-09-26

Publications (1)

Publication Number Publication Date
JPS6354245U true JPS6354245U (US08063081-20111122-C00115.png) 1988-04-12

Family

ID=31062529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14834786U Pending JPS6354245U (US08063081-20111122-C00115.png) 1986-09-26 1986-09-26

Country Status (1)

Country Link
JP (1) JPS6354245U (US08063081-20111122-C00115.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01307153A (ja) * 1988-04-14 1989-12-12 Varian Spa イオンポンプのための改良された電子給電線
JP2015095378A (ja) * 2013-11-13 2015-05-18 株式会社日立ハイテクノロジーズ 高電圧発生回路およびそれを用いたイオンポンプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854465U (ja) * 1981-10-05 1983-04-13 日立建機株式会社 低騒音運転室
JPS5925155A (ja) * 1982-08-03 1984-02-09 Anelva Corp 真空放電装置用電源

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854465U (ja) * 1981-10-05 1983-04-13 日立建機株式会社 低騒音運転室
JPS5925155A (ja) * 1982-08-03 1984-02-09 Anelva Corp 真空放電装置用電源

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01307153A (ja) * 1988-04-14 1989-12-12 Varian Spa イオンポンプのための改良された電子給電線
JP2015095378A (ja) * 2013-11-13 2015-05-18 株式会社日立ハイテクノロジーズ 高電圧発生回路およびそれを用いたイオンポンプ

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