JPS6353616A - Vacuum degree control device for vacuum vessel building in rotating machine - Google Patents

Abstract

PURPOSE:To execute the vacuum degree control in a vacuum vessel without using a vacuum probe by operating a vacuum switch and stopping a rotating machine with a contact signal when a vacuum pressure continues to rise and comes to be a vacuum pressure abnormality judging pressure set beforehand. CONSTITUTION:The operation of a usual vacuum pump 13 repeates the service and the stoppage of a constant time. The pressure of a vacuum vessel 1, while it repeats to rise and fall, is maintained to a prescribed range. When an exhaust cannot be executed well due to the trouble, etc., of a pump and a valve, the pressure in the vacuum vessel 1 rises, a vacuum abnormality judging pressure is obtained, and then, a vacuum switch 21 is operated and a contact signal is inputted to a vacuum exhaust control means 18. Then, the means 18 generates an action command signal to a changing-over switch 15, connects a damping resistance 19, stops a generator 9 and in short, stops a flywheel 6. The pump 13 shortens the idle period at the initial time of a rotating machine operation, the idle period is lengthened together with the time, and then, an evacuation device can be efficiently operated and the long life can be executed.

Description

[Detailed Description of the Invention] [Industrial Applications] This invention relates to a vacuum degree control device in a vacuum container having a built-in rotary machine including a flywheel, and in particular, to This invention relates to a vacuum degree control device which operates repeatedly and operates a vacuum switch to stop a rotating machine when the vacuum pressure in a vacuum container rises to a predetermined level.

[Conventional technology]

Figure 4 is a block diagram showing a conventional vacuum degree control device for a vacuum container with a built-in rotary machine including a flywheel, Figure 5 is a sequence control diagram of the device in Figure 4, and Figure 6 is the pressure inside the vacuum container. It is a graph showing the relationship between windage and windage.

In the figure, (1) is a completely sealed vacuum container to eliminate windage damage, and (2) is a stator fixed inside the vacuum container (1), which consists of an iron core and coils. (3) is the stator (2
), and is supported between the upper bearing (4) and the lower bearing (5). (6) is the axis (3)
The flywheel (7) is fixed to the flywheel (7), and is a rotor made of a permanent magnet that is integrally attached to the flywheel (6).
) and the stator (2) constitute a permanent magnet generator motor.

The generator motor configured as above always has a stator (2
) to supply power to the rotor (7) and flywheel (
6) and store rotational energy in the flywheel (6). When the power that was not being supplied to the stator (2) is turned off due to a power outage, etc., the rotor (7) is rotated by the rotational energy stored in the flywheel (6), thereby obtaining output. It is something.

In such a generator motor, a flywheel (6
) The inside of the container is kept in a vacuum to eliminate windage damage and increase efficiency.

(8) is a vacuum measuring element attached to the vacuum container (1) to measure the internal pressure of the container, that is, the degree of vacuum.

00 is a pipe for the exhaust system of the vacuum container (1), and this pipe 01llIl connects the vacuum container (1) to the main electromagnetic valve (11).
It is connected to the vacuum pump marked 0 via a leak electromagnetic valve (12+) for opening the pipe O■ to the atmosphere.

04) is an oil trap for preventing the oil of the vacuum pump θ■ from flowing back into the pipe 00).

(+5) is a changeover switch installed in the input/output power line of the generator motor (9), and (18) is the main solenoid valve (11) based on the input signal from the vacuum sensor (8), and the leak solenoid valve 02. , vacuum pump a casting, changeover switch (15)
This is a vacuum evacuation control means for sequentially controlling each of the above. σ is an electric control means (braking resistor) for applying electrical braking to the generator motor (9), and this braking resistor α9 is connected to the output power line of the power supply system through a changeover switch (1). has been done.

Therefore, the evacuation control means (1B) has the sequence control function shown in FIG. 5, which is determined from the relationship between the internal pressure of the vacuum container and the windage loss, as shown in FIG. That is, in the relationship between the internal pressure (Torr) of the vacuum container and the windage loss in FIG. 6, the vacuum pressure upper limit set value 1 and the vacuum pressure lower limit set value V2 in FIG. ) or the time A1 when the vacuum pressure lower limit set value V2 is reached, and the time A1
The internal pressure between 01 and 1 after a certain time T has elapsed as shown in FIG. ．． The vacuum pump operating range is between 0 Torr, and the internal pressure in the same figure is 1.0 to 1 O Torr.
The vacuum pressure abnormality judgment area is defined as the vacuum pressure abnormality judgment area from the time point A2 when the pressure reaches the vacuum pressure lower limit setting value ■2 in Figure 5 to the time point when the pressure reaches the vacuum pressure upper limit setting value ■ (when the vacuum pump 6 stops) C. Set between. In addition, the time lag t1 of the main electromagnetic valve (II) from the time point A1 when the pressure reaches the vacuum pump operation area, the time lag t1 when the vacuum pump 03) stops, the time lag 1 when the leak electromagnetic valve 0 works from this stop point onwards.
2,13. Each time point C at which electrical braking is applied to the generator motor (9) when the pressure in the vacuum container (1) reaches an upper limit setting value is preset.

At the end, we will explain the operation. When the generator motor (9) is operated, the vacuum pressure inside the vacuum container (1) or the vacuum sensor (8)
), and when the detected value reaches the lower limit set value v2 due to the pressure increase in the vacuum container (1), at that point A1
Then, the evacuation control means (step 8) outputs an operation command signal to the vacuum pumps θ, and the vacuum pump a is thereby operated.

Next, the evacuation control means (1st) outputs an opening signal for the main electromagnetic valve (11) after a time lag t1 from the time A1, thereby opening the main electromagnetic valve (11).

Therefore, the suction force by the vacuum pump α→ is applied to the vacuum container (1).
The internal pressure decreases. Note that the magnitude of tl in this case is the time required to sufficiently exhaust the inside of the pipe OD, and is set between several seconds and about one minute.

When the vacuum pump α■ is operated and the inside of the vacuum container (1) is evacuated and the pressure decreases (improving the degree of vacuum), the vacuum pump 0■ automatically stops. The meaning of this time T (J is the time during which the vacuum vessel (1) can be evacuated) is set within 1 minute to 24 hours.When the vacuum pump θ is stopped, the main electromagnetic valve (II) is also closed. Subsequently, after t2 hours, the leak solenoid valve 0h) is opened for t3 hours to return the inside of the pipe aQ to atmospheric pressure.

Note that the time t2 is the time required for the main electromagnetic valve to completely close, and is set at approximately 1 second to 5 degrees.

The time t3 is the time required to return the pressure inside the pipe to atmospheric pressure.
It is set to about 1 second to 30 seconds. Main solenoid valve (11
) closes and stops after 10 seconds, then vacuum container (2)
The internal pressure rises to a whistle due to slight leaks and outgassing from the internal materials. Then, when the lower limit set value (2) is reached, the vacuum pump α3) is operated again for one hour to reduce the pressure inside the vacuum container (1), as described above.

That is, the degree of vacuum is controlled by repeating the above operation every time the pressure in the vacuum container (1) reaches the vacuum pressure lower limit set value V2.

Next, when the pressure of A2 reaches the lower limit set value ■2, it appears that the pressure has decreased due to a problem with the vacuum pump or valve (
(Exhaust) If the pressure inside the vacuum container (1) continues to rise and reaches the pressure limit V, (point c), the vacuum exhaust control means (1B) switches on the changeover switch (■). A command signal is output, the braking resistor is connected by the changeover switch (15), and the generator motor (9) is stopped.In other words, the flywheel (6) is stopped.

The reason why the flywheel (6) is stopped at the vacuum pressure upper limit setting value ■ is because the windage loss accompanying the rotation of the flywheel (6) increases as the pressure increases.
), the mechanical strength of the flywheel decreases.

[Problem that the invention sought to solve]

In the vacuum degree control device for a vacuum vessel with a built-in rotary machine as described above, a Villany vacuum gauge is used as the vacuum measuring element (8) to measure the degree of vacuum inside the vacuum vessel (1).
There were the following problems.

(1) The vacuum probe (8) is easily damaged and has a short lifespan.

Also, the accuracy is poor. Therefore, it will be necessary to replace it.

(2) When measuring with the vacuum probe (8), the error increases over time, so the flywheel (6) due to windage
In some cases, the efficiency decreases as the temperature rises and losses increase, making it ineffective.

(3) A separate device is required to attach the vacuum probe (8), which increases the number of parts. Wiring between the vacuum measuring head (8) and the evacuation control means (18) is also required. A space is required to attach the vacuum probe (8), and the vacuum container (1) becomes large. These factors lead to high costs.

This invention was made to solve this problem. Normally, a vacuum pump is operated repeatedly between an operating period and a rest period, and if for some reason the exhaust fails and the vacuum pressure increases, The purpose is to obtain a device that can control the degree of vacuum in a vacuum container without using a vacuum probe by stopping a rotating machine based on the contact signal of a vacuum switch that operates when a preset pressure is reached. And so.

(Means for Solving the Problems) The vacuum degree control device for a vacuum container incorporating a rotating machine according to the present invention has a vacuum pump operation control function that operates the vacuum pump in alternating periods of operation and rest. and a braking means control function that stops the rotating machine based on a contact signal of a vacuum switch that operates at the vacuum abnormality judgment pressure when the pressure in the vacuum container reaches a preset vacuum abnormality judgment pressure. It is equipped with a vacuum exhaust control means.

(Function) In this invention, the vacuum pump normally operates repeatedly between operating periods and rest periods, and when the vacuum pressure increases due to a malfunction in the exhaust system, the vacuum pump operates when the preset pressure is reached. Since the rotating machine is stopped based on the contact signal of the switch, the degree of vacuum inside the vacuum container can be controlled without using a vacuum probe.

[Embodiment] FIG. 1 is a block diagram showing an embodiment of this invention, and FIG. 2 is a sequence control diagram of one embodiment of this invention.

In Figures 1 and 2, the same parts as in Figures 3 and 4 are designated by the same reference numerals (t L). It is provided in the pipe 00) between the two. In addition, this vacuum switch 12
1) is set to operate at a pressure corresponding to the vacuum pressure upper limit set value V of the conventional device described above, that is, the pressure at the 0 point in FIG.
8) is input. Note that the pressure at the 0 point will be referred to as the vacuum abnormality judgment pressure.

Next, the operation will be explained.

First, the operation control of the vacuum pump 0■ in the embodiment of the present invention will be described. The normal operation of the vacuum pump θ■ is as shown in Figure 2.
It is operated with a repetition of the rest period of 2. In other words, the pressure inside the vacuum container (1) is maintained within a predetermined range while repeatedly rising and falling as shown in FIG. In addition,
The timing of operation of the main electromagnetic valve (11) and the leakage electromagnetic valve a2 is the same as in the conventional device shown in FIG.

Note that during the period when the vacuum pump is inactive, the amount of outgas in the vacuum container (1) generally decreases with time, as shown in FIG. For this reason, the vacuum pump Oa does not have a stop period at fixed time intervals of T2, but shortens the stop period at the beginning of the operation of the rotating machine, and lengthens the stop period as time passes, so that the vacuum pump Oa can be used without any vacuum pumps. , solenoid valve (I
It is possible to efficiently operate vacuum evacuation devices such as D and 02 and extend their lifespan. In Fig. 3, Qo is the initial outgas amount, Qt is the outgas amount after t time, and Q
−=Qo・1/JT.

Next, if the evacuation is not successful due to a problem with the vacuum pump 0■ or a problem with the valve, the pressure inside the vacuum container (1) will continue to rise without decreasing, and when the pressure reaches the point at which the vacuum is judged to be abnormal, the vacuum The switch Q1) is operated and its contact signal is input to the evacuation control means (1 day).

When the contact signal of the vacuum switch t21) is manually input, the evacuation control means (1B) outputs an operation command signal to the changeover switch (15), connects the braking resistance α mark by the changeover switch 05), and starts the generator motor (9). ) to stop. In other words, the flywheel (6) is stopped.

(Effects of the Invention) As explained above, normally the vacuum pump is operated repeatedly between the operating period and the rest period, and if the evacuation fails for some reason and the vacuum pressure continues to rise to 14, the preset When the vacuum pressure reaches the abnormality judgment pressure, the vacuum switch operates and the rotating machine is stopped based on the contact signal, so the degree of vacuum inside the vacuum container can be controlled without using a vacuum probe.

As a result, there is no need to replace the vacuum probe, which saves maintenance effort.

[Brief explanation of drawings]

Fig. 1 is a block diagram showing an embodiment of the present invention, Fig. 2 is a sequence control diagram of an embodiment of the invention, and Fig. 3 is the relationship between the amount of gas in the vacuum container and the passage of time. Fig. 4 is a block diagram showing a vacuum degree control device for a vacuum container with a built-in rotary machine including a conventional fly wheel, Fig. 5 is a sequence control diagram of the device shown in Fig. 4, and Fig. 6 is a vacuum It is a graph showing the relationship between pressure inside a container and windage loss. In the figure, (1) is a vacuum vessel, (6) is a flywheel, (
9) is a generator motor (rotating machine), 0■ is a vacuum pump, (1
[]) Ll evacuation control means, I21) is a vacuum switch. Note that the same reference numerals in the figures do not indicate the same or equivalent parts. Agent Patent Attorney Tadashi Sato Figure 6 Repulsion (Torr)→

Claims (3)

[Claims] (1) A vacuum pump that evacuates a vacuum container containing a rotary machine including a flywheel, and a vacuum exhaust control means that controls the exhaust of the vacuum container, and the vacuum exhaust control means controls the vacuum pump during the operation period. and a vacuum pump operation control function that repeatedly operates with a pause period and a rest period, and when the pressure in the vacuum container rises to a preset vacuum abnormality judgment pressure, the vacuum switch operates based on the contact signal of the vacuum switch that operates at the vacuum abnormality judgment pressure. 1. A vacuum degree control device for a vacuum container incorporating a rotating machine, characterized in that the device has a braking means control function for stopping the rotating machine. (2) The vacuum degree control device for a vacuum vessel incorporating a rotating machine according to claim 1, wherein the operating period is a certain time T_1 and the rest period is a certain time T_2. (3) The rotating machine according to claim 1, wherein the operating period is a fixed time T_1, and the rest period is short at the beginning of the operation of the rotating machine and becomes longer as time passes. Vacuum degree control device for vacuum containers with built-in.