JPS635224Y2 - - Google Patents

Info

Publication number
JPS635224Y2
JPS635224Y2 JP1979080485U JP8048579U JPS635224Y2 JP S635224 Y2 JPS635224 Y2 JP S635224Y2 JP 1979080485 U JP1979080485 U JP 1979080485U JP 8048579 U JP8048579 U JP 8048579U JP S635224 Y2 JPS635224 Y2 JP S635224Y2
Authority
JP
Japan
Prior art keywords
carrier gas
raw material
container
passage
saturator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979080485U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55181339U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979080485U priority Critical patent/JPS635224Y2/ja
Publication of JPS55181339U publication Critical patent/JPS55181339U/ja
Application granted granted Critical
Publication of JPS635224Y2 publication Critical patent/JPS635224Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1979080485U 1979-06-12 1979-06-12 Expired JPS635224Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979080485U JPS635224Y2 (cg-RX-API-DMAC10.html) 1979-06-12 1979-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979080485U JPS635224Y2 (cg-RX-API-DMAC10.html) 1979-06-12 1979-06-12

Publications (2)

Publication Number Publication Date
JPS55181339U JPS55181339U (cg-RX-API-DMAC10.html) 1980-12-26
JPS635224Y2 true JPS635224Y2 (cg-RX-API-DMAC10.html) 1988-02-12

Family

ID=29313823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979080485U Expired JPS635224Y2 (cg-RX-API-DMAC10.html) 1979-06-12 1979-06-12

Country Status (1)

Country Link
JP (1) JPS635224Y2 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012248803A (ja) * 2011-05-31 2012-12-13 Hitachi Cable Ltd 金属塩化物ガスの発生装置および金属塩化物ガスの発生方法、並びに、ハイドライド気相成長装置、窒化物半導体ウエハ、窒化物半導体デバイス、窒化物半導体発光ダイオード用ウエハ、窒化物半導体自立基板の製造方法および窒化物半導体結晶
JP6001129B2 (ja) * 2015-04-15 2016-10-05 住友化学株式会社 ハイドライド気相成長装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS445159Y1 (cg-RX-API-DMAC10.html) * 1965-12-06 1969-02-25

Also Published As

Publication number Publication date
JPS55181339U (cg-RX-API-DMAC10.html) 1980-12-26

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