JPS6352099U - - Google Patents
Info
- Publication number
- JPS6352099U JPS6352099U JP14478986U JP14478986U JPS6352099U JP S6352099 U JPS6352099 U JP S6352099U JP 14478986 U JP14478986 U JP 14478986U JP 14478986 U JP14478986 U JP 14478986U JP S6352099 U JPS6352099 U JP S6352099U
- Authority
- JP
- Japan
- Prior art keywords
- insulation material
- shell insulation
- inner shell
- temperature heater
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012774 insulation material Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Description
第１図は本考案の一実施例を示す炉の概略横断
面図であり、第２図は従来形式炉の同概略横断面
図である。
１……炉殻、２……内殻断熱材、３……処理室
、４……高温ヒータ、５……外殻断熱材、５ａ…
…内周、６……低温ヒータ、７……空間、８，９
……電極、Ａ……処理物。
FIG. 1 is a schematic cross-sectional view of a furnace showing an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view of a conventional furnace. DESCRIPTION OF SYMBOLS 1...Furnace shell, 2...Inner shell insulation material, 3...Processing chamber, 4...High temperature heater, 5...Outer shell insulation material, 5a...
...Inner circumference, 6...Low temperature heater, 7...Space, 8,9
... Electrode, A ... Processing object.
Claims (1)
材の内側に配設した高温ヒータと、前記内殻断熱
材を包囲する外殻断熱材と、この外殻断熱材と前
記内殻断熱材との間に配設した低温ヒータとを具
備してなることを特徴とする高温加熱炉。 An inner shell insulation material forming a processing chamber, a high temperature heater disposed inside the inner shell insulation material, an outer shell insulation material surrounding the inner shell insulation material, this outer shell insulation material and the inner shell insulation material. A high-temperature heating furnace characterized by comprising a low-temperature heater disposed between a material and a low-temperature heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14478986U JPS6352099U (en) | 1986-09-20 | 1986-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14478986U JPS6352099U (en) | 1986-09-20 | 1986-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6352099U true JPS6352099U (en) | 1988-04-08 |
Family
ID=31055719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14478986U Pending JPS6352099U (en) | 1986-09-20 | 1986-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6352099U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439700U (en) * | 1990-07-31 | 1992-04-03 |
-
1986
- 1986-09-20 JP JP14478986U patent/JPS6352099U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439700U (en) * | 1990-07-31 | 1992-04-03 |