JPS6351447U - - Google Patents
Info
- Publication number
- JPS6351447U JPS6351447U JP14617586U JP14617586U JPS6351447U JP S6351447 U JPS6351447 U JP S6351447U JP 14617586 U JP14617586 U JP 14617586U JP 14617586 U JP14617586 U JP 14617586U JP S6351447 U JPS6351447 U JP S6351447U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mounting surface
- suction
- suction table
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims 1
Landscapes
- Cleaning In General (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14617586U JPS6351447U (id) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14617586U JPS6351447U (id) | 1986-09-24 | 1986-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6351447U true JPS6351447U (id) | 1988-04-07 |
Family
ID=31058403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14617586U Pending JPS6351447U (id) | 1986-09-24 | 1986-09-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6351447U (id) |
-
1986
- 1986-09-24 JP JP14617586U patent/JPS6351447U/ja active Pending