JPS6351445U - - Google Patents

Info

Publication number

JPS6351445U

JPS6351445U JP14560486U JP14560486U JPS6351445U JP S6351445 U JPS6351445 U JP S6351445U JP 14560486 U JP14560486 U JP 14560486U JP 14560486 U JP14560486 U JP 14560486U JP S6351445 U JPS6351445 U JP S6351445U

Authority

JP

Japan

Prior art keywords

wafer

transport belt

semiconductor wafer

transport

transports

Prior art date

1986-09-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000032258 transport Effects 0.000 claims 4
• 239000004065 semiconductor Substances 0.000 claims 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000007796 conventional method Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)