JPS6351434U - - Google Patents
Info
- Publication number
- JPS6351434U JPS6351434U JP14491886U JP14491886U JPS6351434U JP S6351434 U JPS6351434 U JP S6351434U JP 14491886 U JP14491886 U JP 14491886U JP 14491886 U JP14491886 U JP 14491886U JP S6351434 U JPS6351434 U JP S6351434U
- Authority
- JP
- Japan
- Prior art keywords
- mark
- pattern
- semiconductor device
- axis
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14491886U JPS6351434U (fr) | 1986-09-20 | 1986-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14491886U JPS6351434U (fr) | 1986-09-20 | 1986-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6351434U true JPS6351434U (fr) | 1988-04-07 |
Family
ID=31055972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14491886U Pending JPS6351434U (fr) | 1986-09-20 | 1986-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6351434U (fr) |
-
1986
- 1986-09-20 JP JP14491886U patent/JPS6351434U/ja active Pending