JPS6350442U - - Google Patents

Info

Publication number
JPS6350442U
JPS6350442U JP14344986U JP14344986U JPS6350442U JP S6350442 U JPS6350442 U JP S6350442U JP 14344986 U JP14344986 U JP 14344986U JP 14344986 U JP14344986 U JP 14344986U JP S6350442 U JPS6350442 U JP S6350442U
Authority
JP
Japan
Prior art keywords
scintillator
detection means
cylindrical collector
electrode
arranged opposite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14344986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH067557Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986143449U priority Critical patent/JPH067557Y2/ja
Publication of JPS6350442U publication Critical patent/JPS6350442U/ja
Application granted granted Critical
Publication of JPH067557Y2 publication Critical patent/JPH067557Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
JP1986143449U 1986-09-20 1986-09-20 2次電子検出器 Expired - Lifetime JPH067557Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986143449U JPH067557Y2 (ja) 1986-09-20 1986-09-20 2次電子検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986143449U JPH067557Y2 (ja) 1986-09-20 1986-09-20 2次電子検出器

Publications (2)

Publication Number Publication Date
JPS6350442U true JPS6350442U (US06633600-20031014-M00021.png) 1988-04-05
JPH067557Y2 JPH067557Y2 (ja) 1994-02-23

Family

ID=31053141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986143449U Expired - Lifetime JPH067557Y2 (ja) 1986-09-20 1986-09-20 2次電子検出器

Country Status (1)

Country Link
JP (1) JPH067557Y2 (US06633600-20031014-M00021.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008257914A (ja) * 2007-04-02 2008-10-23 Jeol Ltd ビーム装置
JP2010097844A (ja) * 2008-10-17 2010-04-30 National Institute Of Advanced Industrial Science & Technology 走査型電子顕微鏡およびその使用方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148867U (ja) * 1982-03-30 1983-10-06 株式会社島津製作所 2次電子検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148867U (ja) * 1982-03-30 1983-10-06 株式会社島津製作所 2次電子検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008257914A (ja) * 2007-04-02 2008-10-23 Jeol Ltd ビーム装置
JP2010097844A (ja) * 2008-10-17 2010-04-30 National Institute Of Advanced Industrial Science & Technology 走査型電子顕微鏡およびその使用方法

Also Published As

Publication number Publication date
JPH067557Y2 (ja) 1994-02-23

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