JPS6350438U - - Google Patents
Info
- Publication number
- JPS6350438U JPS6350438U JP14499286U JP14499286U JPS6350438U JP S6350438 U JPS6350438 U JP S6350438U JP 14499286 U JP14499286 U JP 14499286U JP 14499286 U JP14499286 U JP 14499286U JP S6350438 U JPS6350438 U JP S6350438U
- Authority
- JP
- Japan
- Prior art keywords
- potential side
- side flange
- positive electrode
- electrode
- low potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14499286U JPS6350438U (enExample) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14499286U JPS6350438U (enExample) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350438U true JPS6350438U (enExample) | 1988-04-05 |
Family
ID=31056115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14499286U Pending JPS6350438U (enExample) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350438U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019169327A (ja) * | 2018-03-23 | 2019-10-03 | 日新イオン機器株式会社 | イオン源、イオンビーム照射装置 |
-
1986
- 1986-09-19 JP JP14499286U patent/JPS6350438U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019169327A (ja) * | 2018-03-23 | 2019-10-03 | 日新イオン機器株式会社 | イオン源、イオンビーム照射装置 |