JPS6350128U - - Google Patents

Info

Publication number

JPS6350128U

JPS6350128U JP14269586U JP14269586U JPS6350128U JP S6350128 U JPS6350128 U JP S6350128U JP 14269586 U JP14269586 U JP 14269586U JP 14269586 U JP14269586 U JP 14269586U JP S6350128 U JPS6350128 U JP S6350128U

Authority

JP

Japan

Prior art keywords

dry etching

insulators

processing chamber

same time

registration request

Prior art date

1986-09-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims description 4
• 238000001312 dry etching Methods 0.000 claims description 3
• 239000012212 insulator Substances 0.000 claims description 2
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000005530 etching Methods 0.000 description 1