JPS6350126U - - Google Patents

Info

Publication number
JPS6350126U
JPS6350126U JP14268886U JP14268886U JPS6350126U JP S6350126 U JPS6350126 U JP S6350126U JP 14268886 U JP14268886 U JP 14268886U JP 14268886 U JP14268886 U JP 14268886U JP S6350126 U JPS6350126 U JP S6350126U
Authority
JP
Japan
Prior art keywords
plasma
processing
observation window
processing apparatus
observing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14268886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14268886U priority Critical patent/JPS6350126U/ja
Publication of JPS6350126U publication Critical patent/JPS6350126U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP14268886U 1986-09-19 1986-09-19 Pending JPS6350126U (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14268886U JPS6350126U (Direct) 1986-09-19 1986-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14268886U JPS6350126U (Direct) 1986-09-19 1986-09-19

Publications (1)

Publication Number Publication Date
JPS6350126U true JPS6350126U (Direct) 1988-04-05

Family

ID=31051652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14268886U Pending JPS6350126U (Direct) 1986-09-19 1986-09-19

Country Status (1)

Country Link
JP (1) JPS6350126U (Direct)

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