JPS63500851A - Adjustable size laser beam spot generator - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] adjustable size laser beam spot generator Technical background The invention relates to an adjustable size laser according to the central idea of claim 1. - Concerning the device for generating beam sporatra.

machining or medical processes using lasers, e.g. cutting processes or human In eye surgery, depending on the type of laser used for the surface being treated or processed, There is a general problem of adjusting a laser beam with a cross-sectional area of do.

Current state of technology To do this, especially in the field of medical technology, Paris-Olens with changing magnification is used. Beam expanding optical elements are used in conjunction with such elements. This way, sea urchin, example For example, the beam spot area t of a surgical laser on the fundus of the eye - between a certain diameter Can be changed. However, this also changes the aperture cone of the beam This raises the issue of. If this aperture cone becomes too small, its energy The energy density is already high enough to cause injury before the actual surgical site. It becomes. In addition, corneal incisions that can be made with an excimer laser, e.g. It is well known to somehow set the desired beam spot area, e.g. This is not possible with this device.

presentation of the invention The purpose of this invention is to treat corneal damage caused by, for example, high irradiation intensity using a beam spot. can be safely avoided even if the magnitude of the Describe a device for generating a laser beam spot, which can also be generated in the form of a spot. There are many things.

The features of the solution according to the invention are explained in further detail in the claims.

According to this invention, burns and other injuries in the front area of the surgical area can be treated to a certain extent. This can be avoided by working with a laser beam with a large aperture cone. , - The area to be irradiated on the Gallo-like object is a stationary laser with relatively high energy. – The laser is not illuminated by a beam, but follows a predetermined pattern. It sweeps away. Spots of different sizes are created according to the settings of this sweep pattern. The size of the target is achieved in this way. The size of these beam-spots is Can be infinitely modified according to the selected scanning pattern, guaranteeing zoom-like adjustability. Wear.

In this way, the adjustable zoom optical system can be omitted and is also much smaller. Even small adapter structures are possible. [7] Note that the opening of the irradiation cone The corners of the mouth are constant, and the energy density in front of the solidified part does not change because of this. Injury can be effectively prevented.

For fundus coagulation, the laser beam spot size of It can be used to scan larger heel spots, but has proven particularly useful. Ta. This will of course depend on the type of optical system used, the laser source and the field of application. , other spot sizes are also possible and can be taken into account.

Particularly in eye surgery, a circular beam spot is desirable.

Here, the relationship of the irradiated area to the area to be treated is particularly advantageous, and this spot The shape is also particularly advantageous for heat dissipation. However, each Depending on the application, other spot shapes may also be selected, for example square.

The spot scanning may be performed, for example, according to claim 2.

It may also fall in a straight line. According to the invention, the rotary rail according to claim 3 process a circular beam spot using a laser beam, i.e. a ring-shaped beam spot. It is also desirable for the laser beam to rotate on the road. Increase the diameter of this passage By adding the desired spot size, the desired spot size can be obtained. spot size Adjustments can be made automatically or manually, subject to full compliance with this requirement. Wear. The rotational motion of the laser beam is automatically controlled using a typical rotation time of about 8 ms. Advantageously done dynamically. However, this value should not be interpreted as limiting.

Located on the beam spot area. e-war distribution, e.g. beam spot guidance. A number of different measures can be taken to obtain a distribution or homogeneous or uniform illumination. I can do it. Changing the q-power of a laser beam, especially according to local changes is possible according to claim 4.

For example, to obtain uniform illumination, the laser beam with increasing circular ring diameter It is possible to increase the Claim 5 In this case, mechanical There's no need to take any measures. Due to this unique requirement, this The energy increases or decreases continuously towards the periphery of the beam spot. It means ``Seurokoto''.

According to claim 6, a laser beam at the periphery of the beam spot. In addition, to compensate for the longer path by a correspondingly higher recognition time, There is also the possibility of slowly rotating the laser beam.

The scanning motion according to the invention can, of course, be carried out in the most unusual manner, e.g. by acousto-optic deflation. This can also be achieved using vector elements. However, the device according to the invention , preferably having at least one movable optical element (claim 7); It is advantageous to design the element as a rocking device (claim 8). i.e. , is capable of performing movements along two axes simultaneously.

The optical component in question is preferably a single-sided flat plate or a mirror (see claim 1). 10 to 13).

In one variant of the device according to the invention, two swivel pieces are provided, one on top of the other. A plane plate is used as an optical component (claim 10), The swivel shafts can be set at a certain angle to each other, and this part can also be moved out of phase by the drive. Preferably one that swivels back and forth.

For this purpose, the axes of the two planar plates are positioned at an angle of 90” to each other and the , and these two single-sided flat plates have a signal, preferably einus+signal. (Claim 11), driven by an angle engine; It is useful for the signals to be in quadrature with each other.

By synchronized deflection by these two single-sided plane plates, the laser beam is converted into a circular rotational motion.

In another advantageous variant according to the invention, the optical part has at least one Has a mirror. By using two mirrors with swivel axes that create an angle of orientation (claims Section 18), it is possible to obtain an X/Y scan of the desired beam spot, e.g. Wear. Furthermore, it can be rotated by one swivel axis and tilted by the other swivel axis. It is also possible to use a mirror that is visible. The rotational movement of this mirror causes the laser beam to A laser beam whose rotation can be changed infinitely by tilting the mirror. is generated for the diameter of the sweeping circular ring. The rotation of the engine that rotates the mirror By controlling the number of rotations, the irradiation power applied to the beam spot can be infinitely controlled. (Claim 14.16.17).

Ko (7)! In another variant of the invention, a rotating and tilting glass plate is used for optical elements. (Claim 13), this element deflects the laser beam. and shifts it into a circular motion with an adjustable diameter. inclination By constantly increasing , the spiral motion of the laser beam can also be reduced. theory, it can occur. Alternatively, line-by-line grating scanning is also possible.

To obtain the most precise laser beam control possible, it is also necessary to In order to have a large degree of mobility, the optical part preferably has a tilting movement in any direction. It is better to attach it to Jim Pal so that it is possible. In this way, the radial twist It is used primarily to prevent play and friction-free installation. This issue Depending on the description, the rocking device can be a mechanical device.

It is also desirable to achieve rocking motion by electric mill mechanical means.

This allows the device to be designed with a very small number of wearing parts, and This enables quick adjustment of the optical part to the desired position. Attach this device to Jim Pal The parts of the device have permanent magnets with opposite poles located opposite each other, and It consists of a permanent magnet that stabilizes the moving body in the rest position. On the other hand, out of phase with each other It is desirable to place a magnetic coil that is activated and acts on the rocking body.

In this way, a precise circular oscillating movement of the optical part is produced (claims no. Section 19).

It is useful for this purpose to keep the mass moved during rocking small by This can be done by moving the universal joint towards the center; this will improve the functionality of the device. Mechanical resonance frequency can be increased. To further improve this point, reduce the swinging mass. It is necessary to In this way, the oscillation frequency is lowered below the resonant frequency of the mechanical device. You can achieve this by placing it in a safe place. Spot size and laser spot The effect of Served.

Fixation of the magnet when the rocking device largely misses the mechanical stop device, i.e. facing It is also advantageous to provide this to prevent sticking to the poles of a permanent magnet or electromagnet. Ru.

Another way to solve this problem is to use fixed-position magnets that are aligned face-to-face at maximum escape. This can also be done by placing the

In a preferred variant, the device of the invention can be operated in three different ways; By manual methods to reproduce the single-step rocking motion; by using a rocking motion that can be stopped or Alternatively, it can be semi-automatic using a readjustable oscillation radius; fully automatic. last With this operating method, if you use a high-rise shutter, you can project any desired e-turn. and the pattern of dots, e.g. the size of the dots corresponds to the diameter of the laser beam. , or if it is large, a row of points arranged according to a certain point pattern, etc.

An object whose light weight is not in the visible part of the spectrum, but in the ultraviolet or infrared region. When using industrial lasers, it has long been common to use what is commonly known as a aiming light source. Ta.

In contrast to medical surgical lasers, in this method the aiming light source is Check that the laser beam is set on the treatment area prior to surgery. It is scooped up and positioned flush with the surgical laser.

However, this also means that the illuminating light source cannot analyze the sensor, e.g. the fundus. It is said to dazzle the image sensor of the eye, making it impossible to resolve the details of the fundus. cause problems.

The present invention allows the scanning of a predeterminable area to be performed using a beam focused in a small sector. The overall concept of this invention behind this application is also based on this It is recognized here that it is possible to solve the problem: aiming light beam and In contrast to known solutions where the working ray beam and the black rate ray beam are guided flush is moved on a path surrounding the beam spot of the working light beam according to the invention. It will be done. In this way, the working light beam, for example the beam of a surgical laser, is corrected. It is possible to check whether or not the stone is set in the correct spot. However, the working light beam surrounds the area to be worked or treated, so The minute structure can be dazzled by the light of a target light beam, e.g. a helium neon laser. (Claim Ij26Tl.

The path over which the aiming ray beam is guided determines which stroke of the working ray in this method. It can also be adapted to the size of the pot. If the working light beam, e.g. If the beam of a sima laser is used to make an incision in the cornea, the aiming beam is enclosing the entire area (lengthwise) over which the working light beam is moved for scanning Can be done. In case of coagulation, the target light beam is the working laser beam spot. It is possible to guide it along a ring-shaped passage surrounding the ring-shaped n term).

The device according to the invention can of course also be used for the desired laser and the desired treatment object, e.g. It can be used for material processing, vascular surgery, etc. However, according to this invention In this case, the procedure used on the surface or inside of the eyeball is performed on the eye in front of the surgical area. The energy density of the beam is particularly important, and it is also important to resolve even the smallest structures in the treated area. This is particularly advantageous since there is a possibility of

Brief description of the drawing This invention will be further explained using desirable modifications and drawings. In the drawing; Figure 1 shows two swivel single-sided flat plates positioned one above the other as an optical component. A first modified embodiment of the present invention is shown, Figures 2a and 2b show two further variants of the invention in which the optical component is a mirror. shows, FIG. 3 shows another variant of the device according to the invention in which the optical component is a glass plate. death, FIG. 4 shows an example of the retainer and attachment part for the glass plate shown in FIG. FIG. 5 shows another example of the retainer and attachment part for the glass plate shown in FIG. Figures 6a to 60 are detailed representations of the cage arrangement shown in Figure 5; FIG. 7 shows a variant of the magnet device, FIG. 8 shows a variant with an X/Y scanning device.

FIG. 1 shows a variant of the device according to the invention. Laser indicated by arrow 10 - The path of the beam consists of two identical beams placed one above the other at a certain distance from each other. There are two square shaped glass plates. These two one-sided one-sided distributions, n, are used in this method. one is placed above the other, and part of its surface overlaps each other; The longitudinal axes of the In this case, the laser beam is substantially centered so that it passes through the overlapped area. It has become. In the extension of the longitudinal axis, the two single-sided planar plates 20.22 are 6 Each of its shaft parts is provided, each of which in turn has a drive engine, i.e. Le engine nod or connected to the field. In the variant shown, the two single-sided planar plates are , swivels up to 10 degrees in both directions from the horizontal axis. In this method, the shaft portion 2 4 is called the Y-axis, and the axis of shaft portion 5 is called the Y-axis.

These two axes are controlled using signals whose distributions are staggered with respect to each other. The abnormality shown In the form of a sine wave, these are sine wave signals; are indicated by adding "sin" or "eos", respectively.

This relationship is shown in Figure 1b by two sinusoids X and Y drawn offset from each other. This is shown below.

Figure 1b, as a top view of the single-sided flat plate arrangement, shows the mutual correlation of the swivel axis % and the Figure 1a shows two single-sided flat plates and n different swivel positions. Movement is further indicated using arrow marks and arrows. Arrow 10 is relative to the stationary plate. The beam path of the laser beam is shown.

The out-of-phase swivel motion of the two single-sided plane plates causes the laser beam to , deflected in a circular rotational motion. This is the circular shape in Figure 1b (bottom). Indicated by arrows.

Figures 2a and 2b show two variants of the invention using mirrors as optical components. . First, FIG. 2a will be explained. The magnifying optical system allows the laser beam to It will help you expand. Position behind this magnifying optical system! Slope between and ■ Using arrows 72 indicating motion, rotate and tilt as shown at positions ■ and ■. There is an egg-shaped mirror that can be tilted. The magnifying optical system ensures that the laser beam on mirror 70 is approximately It has a diameter of 10 mm and creates a beam spot of about 40 μm on the fundus of the eye. Designed to be. Different tilt positions I and ■ represent different vertical beams of the fundus. This is represented by the symbols ■′ and ■′. Ru. The engine 74 is connected to the mirror 70 by a rotating shaft device 76 and is The gin causes the mirror to undergo extremely rapid rotational motion, as shown by arrows 72 and 78. Tilt both sides at the same time. The rotation speed of the engine 74 can be controlled, and the engine can be The diameter of the area on the fundus scanned by the laser can vary infinitely. This allows you to make the spot on the fundus any size. becomes possible. For example, if the rotational speed s, 000 r, 1), m, If a new engine is selected, the ring zone can be swept approximately once every 8m5ec.

FIG. 2a also shows the radiation beam path in diagram form. The lens (fund) is , serves as gap lighting. This illumination light is deflected toward the eye by a deflecting mirror 82. The light is emitted and enters the eye through the contact glass, illuminating the fundus of the eye. this The illumination beam path is conventional.

FIG. 2b shows another variant in which the mirror is used as an optical component. At all in this device If similar parts are used, they will also be named with the same reference symbol. Re The laser beam 10 is again projected into the magnifying optical system, but is first fixed. It is projected onto the sharp point 70 at an angle of (A) degrees through a fixed position polarizing mirror, and an engine with rotation speed control This time, the mirror performs rotational movement (arrow 17s) and tilting movement (arrow 72). It is set up so that The rotating laser beam is directly aimed at the eye when it is rotated through the mirror. It does not enter the area, but is deflected by going beyond it.

The illumination light (reference, arrow 92) first passes through the lens head and lens element (source). It is projected onto the polarizing prism 82', reflected by the semi-transparent mirror and the prism. through the camera 86 and is projected toward the eye 40. After passing through the prism 86, this deformation The example laser and illumination light enter the eye from substantially the same direction. this is an arrow It is shown in (a).

FIG. 3 shows a variant of the device according to the invention, in which the optical components are 72 and 78; as indicated by position symbols I and ■, respectively, the switch is It is a single-sided flat plate that can be tilted or belled. This glass plate is then It is retained and attached within device 110 as described. Expanding this variant The large optical system consists of two elements ω' and ω". The beam illumination path The configuration is the same as in Figure 2b.

In addition, the microscope arm is located on the stone of prism 82', and from this point the eye 40 is The fundus can be observed substantially in a straight line passing through prism 82 and prism 86. . In this variant, the laser beam is also deflected from the straight aim and In addition, the swinging motion of the glass plate 100 causes it to move into a circular motion; The diameter of the glass plate 100 can be adjusted by selecting the inclination angle of the glass plate 100.

FIG. 4 shows a holding device and a driving device for the glass plate 100 shown in FIG.

Essentially circular disk shaped and concentric to the beam path of the laser beam The housing plate 14, which is positioned, has a flap on its outer surface in the direction of the laser beam. It has a wedge-shaped protrusion 116 which is directed downwardly and as indicated by arrow 78. A first engine 74 provided for rotating the glass plate 1oo is held, and the following Explain. On the opposite side of engine 74, housing plate 114 has a laser - Aimed at the beam source, i.e., aimed opposite to engine 74 , has three guide rods 118 set at 120 degree angles to each other. guy The final end portion of the housing plate 118 has a central opening and is connected to the housing plate 114. (play adjusted parallel to) 120 is held.

The plate 120 has a cog rack 122 on its periphery. This cog rack 122 a first cog wheel forming part of the gear of the second engine 112 in mesh with the second engine 112; There is a file 124.

This engine 112 sets the height of plate 120 as indicated by arrow 126. useful for.

On the side facing the first engine 74, the housing 114 has a flange ring. 128, which defines a central opening, on the outer surface of which a ball bearing 130 is located. 7 runs of cylindrical bearings:) 114 (directed downwards) ing. This cylindrical bearing is mounted at a distance or less relative to the guide rod 118. and has an external diameter such that this bearing is located at a distance relative to plate 120. It also has a height that allows it to be located. The first engine 74 is connected via a shaft 76'. , connected to a second cog wheel 138, which wheel has a cylindrical bearing 132 If the outer surface jin 74 of the flange: ) 134 rotates, as a result, the bearing device 132 also rotates.

A ball bearing 140 is provided on the plate 120 in the radial direction inside the guide rod 118, and One bar 142 of the bar structure with two pars articulated in the make it stop The arm 142 is now pointing downwardly in the rest position of FIG. Aim the laser beam in the axial direction.

In the rest position, the second arm is mounted on a bearing 146 designed as a swing bearing. Inside, it extends radially and horizontally. This bearing is originally cylindrical in shape, with internal It has a cavity and an arched outer surface, and this outer surface has a correspondingly formed bearing 1. 32. The swing bearing 146 is connected to the cylindrical bearing 132 and the second They are connected by arms 144 of the bar structure. The glass plate 100 is a swing bearing 146 in a fixed position.

The device described above operates as follows; the glass plate 100 is connected to the first engine 7. 4 transmits the driving force through the cog wheels 136 and 138, and also Rotated by the first engine 74 since the force is small due to the original bearing device 130. Move to. The swing bearing 146 of the glass plate is supported by the second arm 144 of the bar structure. The arm is connected to a cylindrical bearing 132 which rotates on the carrier. has the effect of Moreover, the glass plate 100 is defined by the bar structures 142 and 144. and is brought into an angular position. In this method, the bar structure also has a second spherical axis. It rotates with itself resting in the receiver 140. This second ball bearing 140 A gear system consisting of a cog rack 122, a cog wheel 124 and an engine 112. Its height is set by the location.

In this way, the swing bearing 146, movably located within the cylindrical bearing 132, Because of this, the glass plate 100 is in a slightly slanted position, as indicated by the arrow 72. , it is brought to a relatively large and diagonal position. In this method, the guide rod 118 serves to set the correct height of plate 120. With this device, The glass plate is rotated in the same way as the mirror in figures 2a and 2b and the glass plate in figure 3. It can be rotated and tilted. In this way, the rotating laser beam at various radial distances from the beam axis of the undirected laser beam. It is formed on the fundus of the eye, and its distance is determined by the tilt of the glass plate.

FIG. 5 shows an alternative arrangement to that shown in FIG. Centered on the direction of the laser beam A spherical outer wall and a cylindrical inner wall are formed in a housing 148 having a coaxial opening with a spherical outer wall and a cylindrical inner wall. A swing bearing 146 having a diameter is located. This swing bearing 146' is It rests within 14 days and can also rotate and swivel. Inside the swing bearing consists of a cylindrical hollow body mounted in place and extending downwards; , a glass plate 100 is fixed at the height of a swing bearing with a low axial extension. ing. The housing 148 allows the swing bearing to move freely like the cylinder 146''. , and a swing on the protruding part so as not to contact the casing 146 at any position. It is designed to hold bearing 146'. This cylindrical retainer 146 is A flange: ) 150 is provided at the opposite end of the bearing 146', and the flange extends outwardly. It has a ring magnet device 152 which is oriented toward and rests on. in this way, The ring magnet device is designed with the north pole pointing upwards and the south pole pointing downwards. child At some axial distance above the ring magnet arrangement 15, a second ring magnet arrangement 15 4 with the poles reversed to the top, i.e. the two ring magnets repel each other. The sea urchin pauses with its north pole facing down and its south pole facing up. In this method, the second A magnet device is fixed on the housing 148 and interlocks with the cylinder 146''. However, two ring magnets, one of which is located axially above the other, do not match. It is set. This I housing has a cylindrical housing plate 144 in its lower part; It has a central opening 156 and also has a coil 158.

In the presented variant, on the housing plate 114, which serves as a coil carrier, It has three coils placed at a distance of 120 degrees.

The device of Figure 5 operates as follows; a defined current is passed through the coils out of phase. 158. A link connected in a fixed position to the holding cylinder 146" The ring magnet 152 is therefore repelled by the coil. Place the coil at 120 degrees As a result, a similar circular rocking motion is produced in an engine controlled by three-phase currents. Ru. A second ring magnet 154 is connected to the housing 14, but the second ring magnet 154 is The repulsive force defined with respect to the coil 158 generate force. In this way, the angular position of the glass plate 100, i.e. its inclination The position can be set accurately. Depending on the strength of the current set in the coil, the glass The angular position of the plate can be set via the swing bearing 146'. like this again A rotating laser beam with a variable radius is generated.

Figures 6a to 60 are similar to Figure 5 for realizing rocking motion by an electrodynamic device. Indicates an alternative device to the one shown. Single-sided flat plate '1000 cylindrical retainer 146'' Since it is mounted on a gimbal, it can be tilted in any direction.

This is achieved by an intermediate cage 162 provided at the height of the glass plate 100, and by a retaining series. A housing 148 that surrounds the conductor 146" at a distance makes it possible to Become. The cylindrical retainer 146'' has a radial flange at its lower end in FIG. 0, and this flange has four permanent holes with a wide outward extension and its north pole facing upward. It has a long magnet on it. Housing 14th radial to middle case:) 162 height It has a facing flange 148' which extends inwardly and whose north pole Place four permanent magnets facing downward and located axially above the first permanent magnet. There is. Permanent magnet 152. ]-54 is that part of this device attached to the gimbal hold in place. In this method, the difference is added and the Then, four magnets are placed with opposite poles facing each other.

150, the housing 148 is e.g. It has an iron coil retainer 114' at its lower end. 4 magnetic carp The coils are positioned on these coil retainers 114' with (a) degrees of staggered positioning. .

In this method, the two opposing coils are energized in turn, so the current flows. Then, one coil exerts a suction moment on the oscillator at once, and the adjacent coil The force exerts a repulsion moment. As a result of sequential energization of each of these two coils, two This produces a phase of , and each phase is given a quadrature phase shift. A sinusoidal current is applied. Thus, if the mechanical-magnetic conditions are ideal, In this case, a precise circular rocking motion of the rocking body is obtained.

Figures 6a and 6b show a rocker with a balance weight 160, a magnet and a glass plate 1oO. A top view of the moving body is shown, while FIG. 6C shows a view of the device from below.

This is a variation of the electrically/magnetically generated rocking motion shown in Figure 6. In the second circuit, the applied sinusoidal currents are treated as signals whose phases are out of phase with each other. , must be fed from two independent channels.

This phase shift, of course, changes depending on the frequency, which changes with changes in rotational speed. should not be done. The current amplitude in this method can be set at any desired tilt angle. It must be variable so that

Figure 7 shows in diagrammatic form another possibility for the arrangement of magnets in fixed positions. ing. To prevent the magnet from sticking, secure it in place on the housing of this variant. The magnets 154 are positioned so as to face obliquely outward and downward.

The oscillating body swings out greatly, which causes the magnet 152 that is firmly connected to the oscillating body to In the arrangement shown in Figure 7, when the magnet is in a highly tilted position, It becomes an extreme posture where the axis most closely aligns with the stone. In this method, the magnet The front surfaces are placed flush with each other and the magnets cannot stick to each other. , rather, they repel each other because of their opposite poles. In addition, magnets have magnetic force They are arranged diagonally to improve the distribution of lines.

FIG. 8 shows yet another device according to the invention, which includes two optical components. mirrors, 200 and 201, which include an axially vibrating element 202 and 203 to vibrate in the direction of arrows 200' and 201'. has been recorded. If the axially vibrating elements 202 and 203 are When controlled by the sinusoidal signal, laser beam 205 also directs the desired beam. Scan the spot in a ring shape.

1L ANNEX τO-HE INTER31AT 0NAL S three entry only CHRE? ORT ON

Claims (1)

[Claims] 1. Focus the laser beam using a small focal aperture spot and a large aperture cone A device is provided to project onto the object, and the focusing spot is adjusted to the desired beam spot. an object, characterized in that it is provided with a deflection device that moves it according to a predetermined scanning pattern on the object; Generates a laser beam spot of adjustable size, especially within the human eye equipment for 2. A deflection device moves the laser beam linearly over the desired beam spot. 2. The device according to claim 1, wherein the device is characterized in that it scrapes. 3. A deflection device directs the laser beam into a circular ring over the desired beam spot. 2. A device according to claim 1, characterized in that it is moved over a circular path. 4. The laser is used to generate a predetermined power density distribution on the beam spot. ・Claim No. 1 characterized in that the power of the beam can be changed by local change. 2. The device according to item 2 or 3. 5. Increasing the laser beam power with increasing circular ring diameter Apparatus according to claim 1, characterized in that: 6. The rotation speed of the circular motion of the laser beam is decreased with the increase of the circular ring diameter. The apparatus according to any one of claims 3 to 5, characterized in that the apparatus is characterized in that: 7. A deflection device scans the laser beam in a predetermined manner across the beam spot. Reduce the number of movable optical parts (20, 22; 70; 100) that are moved by the pattern. Claims characterized in that at least one laser beam has in the beam path The device according to any one of paragraphs 1 to 6. 8. Device according to claim 7, characterized in that the deflection device is a rocking device. . 9. A rocking device provides rotational movement (78) by a first axis and by a second axis. 9. Device according to claim 8, characterized in that it forms a tilting interlock (72). 10. The optical part consists of two swivel single-sided flat plates, one positioned above the other. and the fact that the swivel axis makes an angle, and the single-sided plane plate is phased. It is characterized by being equipped with a drive device that swivels around the swivel axis. An apparatus according to any one of claims 7 to 9. 11. Two single-sided flat plates (20, 22) make a 90 degree angle, and the drive device Two angle engines controlled by sinus signals that are 90 degrees out of phase with each other. 11. Device according to claim 10, characterized in that it has a gin. 12. Claims 7 to 7, characterized in that the optical component is blunt (70). Apparatus according to any of paragraph 9. 13. Claims characterized in that the optical component is a single-sided flat plate (100). The device according to any one of paragraphs 7 to 9. 14. The optical component (70; 100) is swiveled by two swivel axes. Claims 7 to 9, 12, or 13, characterized in that Any of the devices listed above. 15. Engine with speed control device (28, 30; 74) has one swivel shaft The invention is characterized in that the optical components (20, 22; 70; 100) are rotated by The device according to any one of Items 7 to 14. 16. Another drive engine (124) drives the optical component by means of another swivel shaft. Claims 7 to 9 are provided for tilting movement of the 15. The device according to any one of paragraphs 14 and 15. 17. The optical component (70; 100) can be manually tilted by another swivel axis. Any of claims 7 to 9 and 14 to 16 characterized in that The device described in any of the above. 18. The optical component has two mirrors, and the swivel axis of the mirrors is located at the beam spot. Make a 90 degree angle for a linear scan or for a circular ring scan Claim 7, characterized in that it vibrates in the direction of the laser beam. Device. 19. Magnet device (152, 154, 158) for movement of optical component (100) ) Claims 7 to 9, or 14, characterized in that The apparatus according to any one of Items 1 to 18. 20. The holder (146, 146'') of the optical component (100) is the first magnet device. (152) and cooperating with the first magnet arrangement (152). a second magnet arrangement (158) with a single magnetic element (158); Claims characterized in that the optical component is periodically attracted and repelled to cause an oscillating motion of the optical component. 19. Apparatus according to paragraph 19. 21. A third stationary magnet arrangement (154) associated with the first magnet arrangement is a second magnet arrangement. A third magnet device is disposed opposite the device (158) to repel the first magnet device. 21. The device according to claim 20, characterized in that: 22. The first and third magnet devices (152, 154) are made of permanent magnets, and characterized by the fact that the single magnet element (158) of the second magnet device is a coil. 22. The apparatus according to claim 21. 23. The number of coils (158) is 3 or 4, and the coils are in phase with each other. The device according to claim 22, characterized in that the voltage is applied by a disconnected current. Place. 24. characterized in that the aiming light beam is moved on a path surrounding the spot to be treated An apparatus according to any one of claims 1 to 23. 25. Especially when lasers that emit light in the invisible part of the spectrum are used, additional Claim 1, characterized in that an aiming laser is used as the light source of the aiming beam. Apparatus according to paragraph 24. 26. Claims characterized in that the laser is a helium neon laser Apparatus according to paragraph 25. 27. The beam of aiming light is shaped like an essentially circular circular ring surrounding the spot to be treated. The method according to claim 24 to 26, characterized in that the Any of the devices listed above. 28. Whether the working laser is an excimer laser or a neon YAG laser, is a laser having an irradiation wavelength of approximately 3 μm. The device according to any one of Items 27 to 27.