JPS6350042U - - Google Patents

Info

Publication number
JPS6350042U
JPS6350042U JP14385986U JP14385986U JPS6350042U JP S6350042 U JPS6350042 U JP S6350042U JP 14385986 U JP14385986 U JP 14385986U JP 14385986 U JP14385986 U JP 14385986U JP S6350042 U JPS6350042 U JP S6350042U
Authority
JP
Japan
Prior art keywords
negative pressure
inspection target
suction
supported
closed space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14385986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447647Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986143859U priority Critical patent/JPH0447647Y2/ja
Publication of JPS6350042U publication Critical patent/JPS6350042U/ja
Application granted granted Critical
Publication of JPH0447647Y2 publication Critical patent/JPH0447647Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP1986143859U 1986-09-19 1986-09-19 Expired JPH0447647Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986143859U JPH0447647Y2 (https=) 1986-09-19 1986-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986143859U JPH0447647Y2 (https=) 1986-09-19 1986-09-19

Publications (2)

Publication Number Publication Date
JPS6350042U true JPS6350042U (https=) 1988-04-05
JPH0447647Y2 JPH0447647Y2 (https=) 1992-11-10

Family

ID=31053931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986143859U Expired JPH0447647Y2 (https=) 1986-09-19 1986-09-19

Country Status (1)

Country Link
JP (1) JPH0447647Y2 (https=)

Also Published As

Publication number Publication date
JPH0447647Y2 (https=) 1992-11-10

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