JPS6350042U - - Google Patents

Info

Publication number
JPS6350042U
JPS6350042U JP14385986U JP14385986U JPS6350042U JP S6350042 U JPS6350042 U JP S6350042U JP 14385986 U JP14385986 U JP 14385986U JP 14385986 U JP14385986 U JP 14385986U JP S6350042 U JPS6350042 U JP S6350042U
Authority
JP
Japan
Prior art keywords
negative pressure
inspection target
suction
supported
closed space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14385986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447647Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986143859U priority Critical patent/JPH0447647Y2/ja
Publication of JPS6350042U publication Critical patent/JPS6350042U/ja
Application granted granted Critical
Publication of JPH0447647Y2 publication Critical patent/JPH0447647Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP1986143859U 1986-09-19 1986-09-19 Expired JPH0447647Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986143859U JPH0447647Y2 (cs) 1986-09-19 1986-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986143859U JPH0447647Y2 (cs) 1986-09-19 1986-09-19

Publications (2)

Publication Number Publication Date
JPS6350042U true JPS6350042U (cs) 1988-04-05
JPH0447647Y2 JPH0447647Y2 (cs) 1992-11-10

Family

ID=31053931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986143859U Expired JPH0447647Y2 (cs) 1986-09-19 1986-09-19

Country Status (1)

Country Link
JP (1) JPH0447647Y2 (cs)

Also Published As

Publication number Publication date
JPH0447647Y2 (cs) 1992-11-10

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