JPS6349804U - - Google Patents
Info
- Publication number
- JPS6349804U JPS6349804U JP14262486U JP14262486U JPS6349804U JP S6349804 U JPS6349804 U JP S6349804U JP 14262486 U JP14262486 U JP 14262486U JP 14262486 U JP14262486 U JP 14262486U JP S6349804 U JPS6349804 U JP S6349804U
- Authority
- JP
- Japan
- Prior art keywords
- matching element
- waveguide
- stub adjuster
- adjuster
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 description 1
Landscapes
- Non-Reversible Transmitting Devices (AREA)
Description
第１図ａ，ｂは本考案の一実施例に係る調整器
の構造を示す全体斜視図及び要部断面図、第２図
は従来の調整器の構造を示す要部断面図である。
１……導波管、２……補強板、３……ネジ孔、
４……整合素子、５……ロツクナツト、６……案
内管、７……整合素子、７ａ……フランジ部、８
……支持管、８ａ……段部、９……固定ネジ、１
０……ロツクナツト。
1A and 1B are an overall perspective view and a sectional view of a main part showing the structure of a regulator according to an embodiment of the present invention, and FIG. 2 is a sectional view of a main part showing the structure of a conventional regulator. 1... Waveguide, 2... Reinforcement plate, 3... Screw hole,
4... Matching element, 5... Lock nut, 6... Guide tube, 7... Matching element, 7a... Flange portion, 8
...Support tube, 8a...Step, 9...Fixing screw, 1
0... Locknut.
Claims (1)
の先端が導波管の内部に所要寸法突出してなる導
波管スタブ調整器において、 整合素子が絶縁体で形成され、 整合素子の後端を支持する支持材を整合素子の
長手方向に移動させる調整機構が設けられている
ことを特徴とする導波管スタブ調整器。[Scope of Claim for Utility Model Registration] A waveguide stub adjuster in which a matching element passes through an opening formed in a waveguide and its tip protrudes into the waveguide by a required dimension, wherein the matching element is an insulator. What is claimed is: 1. A waveguide stub adjuster comprising: an adjustment mechanism for moving a support member supporting a rear end of the matching element in the longitudinal direction of the matching element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14262486U JPS6349804U (en) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14262486U JPS6349804U (en) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6349804U true JPS6349804U (en) | 1988-04-04 |
Family
ID=31051531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14262486U Pending JPS6349804U (en) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6349804U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003030294A1 (en) * | 2001-09-28 | 2003-04-10 | Tokyo Electron Limited | Matching device and plasma processing apparatus |
-
1986
- 1986-09-19 JP JP14262486U patent/JPS6349804U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003030294A1 (en) * | 2001-09-28 | 2003-04-10 | Tokyo Electron Limited | Matching device and plasma processing apparatus |