JPS6348730U - - Google Patents
Info
- Publication number
- JPS6348730U JPS6348730U JP14057286U JP14057286U JPS6348730U JP S6348730 U JPS6348730 U JP S6348730U JP 14057286 U JP14057286 U JP 14057286U JP 14057286 U JP14057286 U JP 14057286U JP S6348730 U JPS6348730 U JP S6348730U
- Authority
- JP
- Japan
- Prior art keywords
- pallet
- transfer device
- wafer transfer
- levitating
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
Landscapes
- Non-Mechanical Conveyors (AREA)
- Ventilation (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14057286U JPS6348730U (enExample) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14057286U JPS6348730U (enExample) | 1986-09-16 | 1986-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6348730U true JPS6348730U (enExample) | 1988-04-02 |
Family
ID=31047543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14057286U Pending JPS6348730U (enExample) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6348730U (enExample) |
-
1986
- 1986-09-16 JP JP14057286U patent/JPS6348730U/ja active Pending