JPS6348083U - - Google Patents

Info

Publication number
JPS6348083U
JPS6348083U JP14159486U JP14159486U JPS6348083U JP S6348083 U JPS6348083 U JP S6348083U JP 14159486 U JP14159486 U JP 14159486U JP 14159486 U JP14159486 U JP 14159486U JP S6348083 U JPS6348083 U JP S6348083U
Authority
JP
Japan
Prior art keywords
valve body
sealing groove
valve
vacuum valve
contact surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14159486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245585Y2 (US20070244113A1-20071018-C00169.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14159486U priority Critical patent/JPH0245585Y2/ja
Publication of JPS6348083U publication Critical patent/JPS6348083U/ja
Application granted granted Critical
Publication of JPH0245585Y2 publication Critical patent/JPH0245585Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
  • Electrodes Of Semiconductors (AREA)
JP14159486U 1986-09-16 1986-09-16 Expired JPH0245585Y2 (US20070244113A1-20071018-C00169.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14159486U JPH0245585Y2 (US20070244113A1-20071018-C00169.png) 1986-09-16 1986-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14159486U JPH0245585Y2 (US20070244113A1-20071018-C00169.png) 1986-09-16 1986-09-16

Publications (2)

Publication Number Publication Date
JPS6348083U true JPS6348083U (US20070244113A1-20071018-C00169.png) 1988-04-01
JPH0245585Y2 JPH0245585Y2 (US20070244113A1-20071018-C00169.png) 1990-12-03

Family

ID=31049525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14159486U Expired JPH0245585Y2 (US20070244113A1-20071018-C00169.png) 1986-09-16 1986-09-16

Country Status (1)

Country Link
JP (1) JPH0245585Y2 (US20070244113A1-20071018-C00169.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004150510A (ja) * 2002-10-30 2004-05-27 Matsushita Electric Ind Co Ltd 遮断弁
JP2006528330A (ja) * 2003-05-26 2006-12-14 ダンフォス アクチーセルスカブ 真空システムのサーボ弁

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004150510A (ja) * 2002-10-30 2004-05-27 Matsushita Electric Ind Co Ltd 遮断弁
JP2006528330A (ja) * 2003-05-26 2006-12-14 ダンフォス アクチーセルスカブ 真空システムのサーボ弁

Also Published As

Publication number Publication date
JPH0245585Y2 (US20070244113A1-20071018-C00169.png) 1990-12-03

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