JPS6347785B2 - - Google Patents
Info
- Publication number
- JPS6347785B2 JPS6347785B2 JP15293479A JP15293479A JPS6347785B2 JP S6347785 B2 JPS6347785 B2 JP S6347785B2 JP 15293479 A JP15293479 A JP 15293479A JP 15293479 A JP15293479 A JP 15293479A JP S6347785 B2 JPS6347785 B2 JP S6347785B2
- Authority
- JP
- Japan
- Prior art keywords
- shield ring
- cathode
- magnet
- sputtering
- sputter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 25
- 235000012431 wafers Nutrition 0.000 description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 7
- -1 argon ions Chemical class 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15293479A JPS5677380A (en) | 1979-11-28 | 1979-11-28 | Sputtering apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15293479A JPS5677380A (en) | 1979-11-28 | 1979-11-28 | Sputtering apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5677380A JPS5677380A (en) | 1981-06-25 |
| JPS6347785B2 true JPS6347785B2 (US20110009641A1-20110113-C00116.png) | 1988-09-26 |
Family
ID=15551331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15293479A Granted JPS5677380A (en) | 1979-11-28 | 1979-11-28 | Sputtering apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5677380A (US20110009641A1-20110113-C00116.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03112075U (US20110009641A1-20110113-C00116.png) * | 1990-02-28 | 1991-11-15 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60110873A (ja) * | 1983-11-17 | 1985-06-17 | Fujitsu Ltd | タ−ゲットの冷却方法 |
-
1979
- 1979-11-28 JP JP15293479A patent/JPS5677380A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03112075U (US20110009641A1-20110113-C00116.png) * | 1990-02-28 | 1991-11-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5677380A (en) | 1981-06-25 |
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