JPS6347569U - - Google Patents
Info
- Publication number
- JPS6347569U JPS6347569U JP14203086U JP14203086U JPS6347569U JP S6347569 U JPS6347569 U JP S6347569U JP 14203086 U JP14203086 U JP 14203086U JP 14203086 U JP14203086 U JP 14203086U JP S6347569 U JPS6347569 U JP S6347569U
- Authority
- JP
- Japan
- Prior art keywords
- observation
- plate
- observation plate
- particle beam
- charged particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 3
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14203086U JPS6347569U (enExample) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14203086U JPS6347569U (enExample) | 1986-09-16 | 1986-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6347569U true JPS6347569U (enExample) | 1988-03-31 |
Family
ID=31050371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14203086U Pending JPS6347569U (enExample) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347569U (enExample) |
-
1986
- 1986-09-16 JP JP14203086U patent/JPS6347569U/ja active Pending
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