JPS6347569U - - Google Patents

Info

Publication number
JPS6347569U
JPS6347569U JP14203086U JP14203086U JPS6347569U JP S6347569 U JPS6347569 U JP S6347569U JP 14203086 U JP14203086 U JP 14203086U JP 14203086 U JP14203086 U JP 14203086U JP S6347569 U JPS6347569 U JP S6347569U
Authority
JP
Japan
Prior art keywords
observation
plate
observation plate
particle beam
charged particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14203086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14203086U priority Critical patent/JPS6347569U/ja
Publication of JPS6347569U publication Critical patent/JPS6347569U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14203086U 1986-09-16 1986-09-16 Pending JPS6347569U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14203086U JPS6347569U (enrdf_load_stackoverflow) 1986-09-16 1986-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14203086U JPS6347569U (enrdf_load_stackoverflow) 1986-09-16 1986-09-16

Publications (1)

Publication Number Publication Date
JPS6347569U true JPS6347569U (enrdf_load_stackoverflow) 1988-03-31

Family

ID=31050371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14203086U Pending JPS6347569U (enrdf_load_stackoverflow) 1986-09-16 1986-09-16

Country Status (1)

Country Link
JP (1) JPS6347569U (enrdf_load_stackoverflow)

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