JPS6347348U - - Google Patents

Info

Publication number
JPS6347348U
JPS6347348U JP1986141189U JP14118986U JPS6347348U JP S6347348 U JPS6347348 U JP S6347348U JP 1986141189 U JP1986141189 U JP 1986141189U JP 14118986 U JP14118986 U JP 14118986U JP S6347348 U JPS6347348 U JP S6347348U
Authority
JP
Japan
Prior art keywords
pellicle
photomask
case
pin
positioning protrusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986141189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986141189U priority Critical patent/JPS6347348U/ja
Publication of JPS6347348U publication Critical patent/JPS6347348U/ja
Pending legal-status Critical Current

Links

JP1986141189U 1986-09-12 1986-09-12 Pending JPS6347348U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986141189U JPS6347348U (enrdf_load_stackoverflow) 1986-09-12 1986-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986141189U JPS6347348U (enrdf_load_stackoverflow) 1986-09-12 1986-09-12

Publications (1)

Publication Number Publication Date
JPS6347348U true JPS6347348U (enrdf_load_stackoverflow) 1988-03-31

Family

ID=31048751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986141189U Pending JPS6347348U (enrdf_load_stackoverflow) 1986-09-12 1986-09-12

Country Status (1)

Country Link
JP (1) JPS6347348U (enrdf_load_stackoverflow)

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