JPS6347255U - - Google Patents

Info

Publication number
JPS6347255U
JPS6347255U JP13959286U JP13959286U JPS6347255U JP S6347255 U JPS6347255 U JP S6347255U JP 13959286 U JP13959286 U JP 13959286U JP 13959286 U JP13959286 U JP 13959286U JP S6347255 U JPS6347255 U JP S6347255U
Authority
JP
Japan
Prior art keywords
flow rate
gas
restriction part
rate restriction
series
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13959286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13959286U priority Critical patent/JPS6347255U/ja
Publication of JPS6347255U publication Critical patent/JPS6347255U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
JP13959286U 1986-09-11 1986-09-11 Pending JPS6347255U (ref)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13959286U JPS6347255U (ref) 1986-09-11 1986-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13959286U JPS6347255U (ref) 1986-09-11 1986-09-11

Publications (1)

Publication Number Publication Date
JPS6347255U true JPS6347255U (ref) 1988-03-30

Family

ID=31045642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13959286U Pending JPS6347255U (ref) 1986-09-11 1986-09-11

Country Status (1)

Country Link
JP (1) JPS6347255U (ref)

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