JPS6347255U - - Google Patents
Info
- Publication number
- JPS6347255U JPS6347255U JP13959286U JP13959286U JPS6347255U JP S6347255 U JPS6347255 U JP S6347255U JP 13959286 U JP13959286 U JP 13959286U JP 13959286 U JP13959286 U JP 13959286U JP S6347255 U JPS6347255 U JP S6347255U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas
- restriction part
- rate restriction
- series
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13959286U JPS6347255U (de) | 1986-09-11 | 1986-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13959286U JPS6347255U (de) | 1986-09-11 | 1986-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6347255U true JPS6347255U (de) | 1988-03-30 |
Family
ID=31045642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13959286U Pending JPS6347255U (de) | 1986-09-11 | 1986-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347255U (de) |
-
1986
- 1986-09-11 JP JP13959286U patent/JPS6347255U/ja active Pending
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